混合气体射频热等离子体温度及流场分布的数值模拟  

Distribution of Temperature and Flow Fields of Gas-Mixture RF Thermal Plasma:A Simulation Study

作　　者：陈文波[1,2] 陈伦江[2] 刘川东[2] 程昌明[2] 童洪辉[2] 朱海龙[3] Chen Wenbo;Chen Lunjiang;Liu Chuan-dong;Cheng Changming;Tong Honghui;Zhu Hailong(College of Electrical Engineering,University of south China,Hengyang 421001,China;Southwestern Institute of Physics,Chengdu 610041,China;College of Physics and Electronics Engineering,Shanxi University,Taiyuan 030006,China)

机构地区：[1]南华大学电气工程学院,衡阳421001 [2]核工业西南物理研究院,成都610041 [3]山西大学物理电子工程学院,山西030006

出　　处：《真空科学与技术学报》2020年第12期1124-1130,共7页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金重点资助项目(11535003);国家自然科学基金面上项目(11675074);国家自然科学基金青年科学基金项目(11805058)。

摘　　要：研究混合气体射频热等离子体的温度及流场分布可以为等离子体炬在特定场合下的应用提供参考。本文建立了射频热等离子体炬的物理模型,利用FLUENT软件分别对线圈电流不同时,纯氩气、氩-氧气、氩-氮气、氩-空气及氩-氢气等离子体的温度及流场空间分布进行了研究。研究结果表明:与纯氩等离子体相比,混合气体等离子体的体积减小,核心温度降低,但等离子体速度则会有所提升;提高线圈电流能够使混合气体等离子体的体积增大,且速度和温度均有一定程度的提高。The study of the temperature and flow field distribution of mixed gas radio frequency(RF)thermal plasma can provide a reference for the application of plasma torch in specific occasions.In this paper,a physical model of RF thermal plasma torch is established.The temperature and flow field distributions of pure argon,argon-oxygen,argon-nitrogen,argon-air,and argon-hydrogen plasma has been studied using FLUENT software for different coil currents.The results show that the volume and core temperature of the mixed gas plasma is reduced,but the plasma velocity is increased compared with pure argon plasma.Futhermore,The plasma speed,temperature and the volume of the mixed gas plasma will increase with the coil current increasing to some extent.

关 键 词：混合气体 射频热等离子体 温度分布 流场分布 

分 类 号：TB126[理学—工程力学]