红外显微光学系统的小像差互补设计方法  

Design method of infrared microscope optical system with lower aberration compensation

作　　者：刘智颖 吕知洋 高柳絮 Liu Zhiying;Lv Zhiyang;Gao Liuxu(Key Laboratory of Optoelectric Measurement and Optical Information Transmission Technology of Ministry of Education,School of Opto-Electronic Engineering,Changchun University of Science and Technology,Changchun 130022,China)

机构地区：[1]长春理工大学光电工程学院光电测控与光信息传输技术教育部重点实验室,吉林长春130022

出　　处：《红外与激光工程》2021年第2期26-32,共7页Infrared and Laser Engineering

基　　金：国家自然科学基金(61805025)。

摘　　要：针对显微系统具有高分辨率与高成像质量的要求,其系统一般片数多装调困难,导致系统存在实际的装调效果与设计结果之间难以匹配的问题,因此提出了小像差互补的方法对系统进行设计。首先,建立基于小像差互补设计方法的数学模型,然后将其编写为可用于控制ZEMAX软件的宏语言(ZPL),再对光学系统进行优化设计。最后以一红外显微光学系统为例,对比小像差互补设计方法使用前后的优化结果,对小像差互补设计方法进行了验证,发现应用小像差互补设计方法的光学系统,总体成像质量具有突出优势,各元件的公差敏感性明显降低,整体光学系统的稳定性得到了有效提高。Aiming at the requirements of high resolution and high imaging quality of the microscope system,the general number of pieces of the system is difficult to adjust,so that the system is difficult to match the actual adjustment result and the design result.Therefore,the lower aberration compensation design method was proposed to design the system.At the same time,the sensitivity of each optical component in a system could be reduced.First,a mathematical model of the lower aberration compensation design method was established,and then it was written into ZEMAX programming language(ZPL)macro that could be used to control ZEMAX to optimize the optical system.Finally,an infrared microscope system was taken as an example.Comparing the optimization results before and after the implementation of the lower aberration compensation design method,it was validated that the proposed method was efficient.It is found that the optical system using the lower aberration compensation design method has an outstanding advantage in image quality comparing with the conventional method.The tolerance sensitivity of each component is significantly reduced,thereby improving the stability of the overall optical system effectively.

关 键 词：红外显微系统设计 小像差互补设计方法 宏语言 波像差 

分 类 号：TH741[机械工程—光学工程]