基于DMD的小型近红外光谱仪原理及优化分析  

Principle and optimum analysis of small near-infrared spectrometers based on digital micromirror device

作　　者：刘宏明 刘玉娟[1] 宋莹 仲志成 孔令胜 刘怀宾[2] Liu Hongming;Liu Yujuan;Song Ying;Zhong Zhicheng;Kong Lingsheng;Liu Huaibin(Key Laboratory of Geophysical Exploration Equipment,Ministry of Education,College of Instrumentation&Electrical Engineering,Jilin University,Changchun 130021,China;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130012,China;Tonghua Normal University,Tonghua 134002,China)

机构地区：[1]吉林大学仪器科学与电气工程学院地球信息探测仪器教育部重点实验室,吉林长春130021 [2]中国科学院长春光学精密机械与物理研究所,吉林长春130021 [3]通化师范学院,吉林通化134002

出　　处：《红外与激光工程》2021年第2期68-74,共7页Infrared and Laser Engineering

基　　金：国家自然科学基金(41974210,61705221,41504135);吉林省创新能力建设项目(2019C035-1)。

摘　　要：数字微镜器件小型近红外光谱仪器具有检测速度快、灵敏度高、无损伤检测、仪器小型化等优点,广泛应用于化学成分分析和质量检测。然而,作为仪器设计的前提,整个光谱范围的光学优化设计是系统的难点。文中研究了基于数字微镜器件小型近红外光谱仪的光谱成像系统的理论设计方法。该方法采用双配消像差透镜,结合几何像差理论,对小型数字微镜器件近红外光谱仪的设计进行了优化,以降低整个系统的像差。然后,利用光学仿真软件对准直接成像系统进行光学仿真。最终达到设计仿真要求。仿真结果表明,该分光计的整体尺寸小于150 mm×150 mm×150 mm,在工作波段1000~1700 nm范围内,其分辨率优于15 nm。因此,该方法能满足设计要求,在实际应用中具有广阔的应用前景。The DMD small near-infrared spectroscopy instrument is widely used in chemical composition analysis and quality inspection for its advantages of fast detection speed,high sensitivity,no damage detection,and miniaturization of portable instruments.However,as the premise of instrument design,optical optimization design of the whole spectral range is the hard work of the system.In this paper,the theoretical design method of the spectroscopic imaging system based on the small near-infrared spectrometer of DMD was studied.The method was designed by using the double-dispensing anti-aberration lens and combining the geometric aberration theory to optimize the design of a small DMD near-infrared spectrometer to reduce the aberration of the entire system.Then,the optical simulation software was used to align the direct imaging system for optical simulation.And ultimately achieve the design simulation requirements.Simulation results indicate that the whole size of the spectrometer is less than 150 mm×150 mm×150 mm,and the resolution is better than 15 nm in the range of1000-1700 nm in the working band.Therefore,the proposed method can meet the design requirements and has broad application prospects in practical applications.

关 键 词：近红外光谱仪器 数字微镜器件 原理与优化分析 

分 类 号：TH74[机械工程—光学工程]