基于N次图像旋转法的两平晶三面互检技术研究  

Two-flat crystal three-sided mutual test technology based on N-position image rotation method

作　　者：张正宇 陈磊[1] 孔璐 王云涛 陈佳 胡晨辉 郑东晖[1] ZHANG Zhengyu;CHEN Lei;KONG Lu;WANG Yuntao;CHEN Jia;HU Chenhui;ZHENG Donghui(School of Electronic and Optical Engineering,Nanjing University of Science&Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《应用光学》2021年第1期104-112,共9页Journal of Applied Optics

基　　金：国家自然科学基金(U1731115);江苏省自然科学基金青年基金(SBK2020040312);中国博士后科学基金面上资助(2020M671495);江苏省博士后科研计划(2019K240)。

摘　　要：光学平面面形的绝对检验技术规避了干涉仪参考面形精度的制约,能够有效提高平晶面形的检测精度。采用N次图像旋转法的两平晶三面互检的绝对检验技术,求解待测平晶的三维绝对面形分布,结果中包含了中频波段的信息。利用递推公式构造旋转变化项的N次虚拟旋转结果,求和平均后得到旋转变化项,叠加旋转不变项结果后得到待测波面面形。推导了算法的理论误差,针对旋转角度进行优化并增加虚拟旋转次数,提高了算法精度,优化后的仿真结果的残差波面的均方根值精度为0.14 nm。对150 mm口径平晶进行两平晶三面互检实验,并将实验结果与传统三面互检法结果进行比对,均方根值偏差小于0.5 nm,验证了算法的准确性。The absolute test technology of optical surface shape avoids the limitation of reference surface shape accuracy of interferometer and can effectively improve the detection accuracy of flat-crystal surface shape.The absolute test technology of two-flat crystal three-sided mutual test of N-position image rotation method was adopted to solve the three-dimensional absolute surface shape distribution of tested flat-crystal,and the results included the information in medium frequency band.The recursion formula was used to construct the Nposition virtual rotation results of rotational change item.After summing and averaging,the rotational change item was obtained,and the tested wave surface shape was obtained after superposition of the rotational invariant item.The theoretical error of the algorithm was derived,the rotation angle was optimized and the number of virtual rotation was increased,and the accuracy of the algorithm was improved.After optimization,the simulation results show that the RMS value accuracy of residual wave surface is 0.14 nm.The two-flat crystal three-sided mutual test of flat-crystal with 150 mm caliber was carried out,and the experimental results were compared with those of the traditional three-sided mutual test method.The RMS value deviation is less than 0.5 nm,which verifies the accuracy of the algorithm.

关 键 词：干涉测量 平面绝对检验 N次图像旋转法 

分 类 号：O436[机械工程—光学工程] TN206[理学—光学]