自由曲面成像系统的光学性能评价  

Evaluation of Optical Performance of Free-Form Surface Imaging System

作　　者：陈玉强 张效栋[1] 刘现磊[1] Chen Yuqiang;Zhang Xiaodong;Liu Xianlei(State Key Laboratory of Precision Measuring Technology&Instruments,Centre of Micro Nano Manufacturing Technology,Tianjin University,Tianjin 300072,China)

机构地区：[1]天津大学微纳制造工程技术中心精密测试技术及仪器国家重点实验室,天津300072

出　　处：《光学学报》2020年第24期82-91,共10页Acta Optica Sinica

基　　金：国家重点研发计划(2017YFA0701200);国家自然科学基金(61635008);中国博士后科学基金(2018M641645);天津市自然科学基金(19JCZDJC39100)。

摘　　要：光学自由曲面的波前像差复杂多样且非对称,当波前像差的峰谷值满足要求时,对应的光学调制传递函数未必满足要求。因此,必须获得主要的光学性能参数进行评价,但目前没有专门的软件可实现光学性能参数之间的相互转化。基于傅里叶光学与相位重构理论,建立了光学性能基本指标评价体系。通过测量单一光学性能参数实现光学性能的多参数评价,降低了测量成本,提高了测量效率,并通过仿真与实验验证了该体系的正确性。研究结果可为自由曲面成像光学系统的面形误差补偿及光学质量可控制造提供理论指导。The wavefront errors(WFE) of optical freeform surfaces are complex, diverse and asymmetric. When the peak valley values of WFE meet the requirements, the corresponding optical modulation transfer function may not meet the requirements. Therefore, it is necessary to obtain the main optical performance parameters for evaluation. However, there is no special software to realize the mutual conversion between optical performance parameters. Based on the theory of Fourier optics and phase retrieval, the basic index evaluation system of optical performance is established in this work. The multi parameter evaluation of optical performance is realized by measuring a single optical performance parameter. The measurement cost is reduced and the measurement efficiency is improved. The correctness of the system is verified by simulation and experiment. The research results can provide theoretical guidance for surface error compensation and optical quality controllable manufacturing of free-form imaging surface imaging optical system.

关 键 词：傅里叶光学 光学性能 波前像差 点扩展函数 调制传递函数 

分 类 号：O439[机械工程—光学工程]