基于纳米颗粒阵列与法布里-珀罗干涉结构的超灵敏传感器设计  

Design of ultra-sensitive sensor based on nanoparticle array and Fabry-Pérot interference structure

作　　者：曲鳞鸿 方蔚瑞 QU Linhong;FANG Yurui(School of Physics, Dalian University of Technology, Dalian 116024, China)

机构地区：[1]大连理工大学物理学院,辽宁大连116024

出　　处：《大连理工大学学报》2021年第2期111-117,共7页Journal of Dalian University of Technology

基　　金：中央高校基本科研业务费专项资金资助项目(DUT19RC(3)007).

摘　　要：当前的等离激元传感主要基于表面等离极化激元和局域表面等离激元共振两种模式.然而基于表面等离极化激元的传感需要精确的入射角度及多种光学元器件的配合方能使用;而基于局域表面等离激元共振的传感由于共振线宽较宽导致其灵敏度和品质因数(figure of merit,FOM)不够高.设计了一种基于纳米颗粒/间隔层/反射层结构的具有超高灵敏度和FOM的折射率传感器.由于表面等离激元晶格模式与局域表面等离激元共振以及法布里-珀罗干涉的相互作用,器件的反射光谱具有一个超窄反射峰.利用这个反射峰实现传感,其灵敏度达到500 nm/RIU,FOM达到625.进一步分析表明,此传感器在不同结构与激发参数下都具有很好的传感灵敏度.该研究结果对高灵敏等离激元传感器设计具有重要参考意义.Plasmon sensors are mainly based on surface plasmon polaritons(SPPs)and localized surface plasmon resonances(LSPR).However,sensing based on SPPs needs the accurate incident angle and the cooperation of kinds of optical components;and sensing based on LSPR has discontented sensitivity and figure of merit(FOM)because of the large resonance peak width.A reflective index sensor based on nanoparticle/gap/reflective film structure is designed,which has ultrahigh sensitivity and FOM.Benefit on the interaction of plasmonic lattice,LSPR and Fabry-Pérot,there is a very narrow resonance peak on the reflection spectrum,whose sensitivity reaches 500 nm/RIU and the FOM reaches 625.Additionally,the sensor works very well under different structures and excitation parameters.The result can be a helpful reference for designing high sensitive plasmonic sensors.

关 键 词：表面等离激元 法布里-珀罗干涉 品质因数(FOM) 超灵敏传感 

分 类 号：O433[机械工程—光学工程]