共振光隧穿微腔Q值提高研究  

Improvement of Q Value Based on Resonant Optical Tunneling Effect Microcavity

作　　者：燕鹏云 刘洋 桑胜波[1,2] 菅傲群 YAN Pengyun;LIU Yang;SANG Shengbo;JIAN Aoqun(MICRO-NANO System Research Center,Taiyuan University of Technology,Taiyuan 030024,China;b.Key Laboratory of Advanced Transducers and Intelligent Control System Ministry of Education and Shanxi Province,Taiyuan University of Technology,Taiyuan 030024,China)

机构地区：[1]太原理工大学微纳系统研究中心,太原030024 [2]太原理工大学新型传感器与智能控制教育部和山西省重点实验室,太原030024

出　　处：《太原理工大学学报》2021年第2期320-326,共7页Journal of Taiyuan University of Technology

基　　金：国家自然科学基金面上项目资助(61971301);山西省平台基地和人才专项项目资助(201805D211021)。

摘　　要：作为一种经典光学结构,光学谐振腔在光通信、光传感等领域得到了广泛的应用,一直是光电子学研究的热点。共振光隧穿谐振腔,源自受抑全内反射,是一种新型的光学微腔。依据Gansch公式,拟通过两种方式降低腔体的吸收(提高Q_(abs))和改变结构参数(提高Q_(str)),提高谐振腔Q值。因此,建立了共振光隧穿效应(ROTE)结构的谐振腔模型;利用传输矩阵法,仿真计算了谐振腔的反射谱谱线,并分析了其Q值变化规律。仿真结果显示:通过降低腔体吸收和调节系统参数(隧穿层厚度、入射角等),ROTE结构的谐振腔Q值总计提升了约10^(5)倍,可期望Q值达到10^(8).相比传统的FP腔结构(Q值在10^(3)~10^(4)数量级)和当前主流的回音壁模式结构(Q值在10^(7)~10^(8)数量级),ROTE结构谐振腔的理论Q值可达到国际一流水平,同时还具有易于集成、工艺简单、稳定性高、成本低廉的优点。为高Q值ROTE结构的制备及进一步应用奠定了理论基础。As a classical optical structure,optical resonator has been widely used in optical communication and optical sensing,and has always been a hot spot in optoelectronics research.Resonant optical tunneling effect microcavity,derived from frustrated total internal reflection,is a new type of optical microcavity.According to the Gansch formula,two methods were adopted to reduce the absorption of cavity(increase Q_(abs))and change the structural parameters to increase the Q value of the structure(increase Q_(str)).ROTE structure model was established,and by using the transfer matrix method,the reflection spectrum line and Q value of rote structure were evaluated.The simulation results show that by reducing the cavity absorption and adjusting system parameters(tunneling layer thickness,incident angle,etc),the total Q value of the resonant cavity of the ROTE structure is increased by about 10^(5) times,and the Q value can be expected to reach 10^(8).Compared with the traditional FP cavity structure(Q value is in the order of 10^(3)-10^(4))and the current mainstream whispering gallery mode structure(Q value is in the order of 10^(7)-10^(8)),the ROTE structure resonator can reach the world-class level in the theoretical Q value,and also has the advantages of easy integration,simple process,high-stability,and low cost.This article paves the road for the preparation and further application of high-Q ROTE structure.

关 键 词：光学谐振腔 共振光隧穿效应 受抑全内反射 传输矩阵法 品质因子 

分 类 号：TN256[电子电信—物理电子学]