Photoic crystal nanobeam cavity devices for on-chip integrated silicon photonics  

作　　者：Daquan Yang Xiao Liu Xiaogang Li Bing Duan Aiqiang Wang Yunfeng Xiao 

机构地区：[1]State Key Laboratory of Information Photonics and Optical Communications,and School of Information and Communication Engineering,Beijing University of Posts and Telecommunications,Beijing 100876,China [2]State Key Laboratory for Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,Beijing 100871,China [3]Frontiers Science Center for Nano-Optoelectronics&Collaborative Innovation Center of Quantum Matter,Beijing 100871,China [4]Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China [5]Beijing Academy of Quantum Information Sciences,Beijing 100193,China

出　　处：《Journal of Semiconductors》2021年第2期40-50,共11页半导体学报（英文版）

基　　金：This work was supported by the National Key R&D Program of China(Grant No.2016YFA0301302 and No.2018YFB 2200401);the National Natural Science Foundation of China(Grant Nos.11974058,11825402,11654003,61435001);Beijing Academy of Quantum Information Sciences(Grant No.Y18G20);Key R&D Program of Guangdong Province(Grant No.2018B030329001);Beijing Nova Program(Grant No.Z201100006820125)from Beijing Municipal Science;Technology Commission,Fundamental Research Funds for the Central Universities(Grant No.2018XKJC05);the High Performance Computing Platform of Peking University.

摘　　要：Integrated circuit(IC)industry has fully considered the fact that the Moore’s Law is slowing down or ending.Alternative solutions are highly and urgently desired to break the physical size limits in the More-than-Moore era.Integrated silicon photonics technology exhibits distinguished potential to achieve faster operation speed,less power dissipation,and lower cost in IC industry,because their COMS compatibility,fast response,and high monolithic integration capability.Particularly,compared with other on-chip resonators(e.g.microrings,2D photonic crystal cavities)silicon-on-insulator(SOI)-based photonic crystal nanobeam cavity(PCNC)has emerged as a promising platform for on-chip integration,due to their attractive properties of ultra-high Q/V,ultra-compact footprints and convenient integration with silicon bus-waveguides.In this paper,we present a comprehensive review on recent progress of on-chip PCNC devices for lasing,modulation,switching/filting and label-free sensing,etc.

关 键 词：PCNC integrated silicon photonics More-than-Moore LAB-ON-A-CHIP hybrid devices 

分 类 号：TN43[电子电信—微电子学与固体电子学]