小型磁偏转质谱计研究  

Study on Miniature Magnetic Sector Mass Spectrometer

作　　者：董猛[1] 成永军[1] 孙雯君[1] 郭美如[1] 李晓旭[2] 肖梅[3] 吴成耀 刘畅[3] DONG Meng;CHENG Yong-jun;SUN Wen-jun;GUO Mei-ru;LI Xiao-xu;XIAO Mei;WU Cheng-yao;LIU Chang(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;School of Mechanical and Electrical Engineering,Soochow University,Suzhou 215021,China;School of Electronic Science and Engineering,Southeast University,Nanjing 210096,China)

机构地区：[1]兰州空间技术物理研究所,真空技术与物理重点实验室,甘肃兰州730000 [2]苏州大学机械与电子工程学院,江苏苏州215021 [3]东南大学电子科学与工程学院,江苏南京210096

出　　处：《质谱学报》2021年第2期154-162,共9页Journal of Chinese Mass Spectrometry Society

基　　金：国家自然科学基金项目(61901203,61841106);甘肃省杰出青年基金项目(18JR3RA413)资助。

摘　　要：基于磁质谱离子光学成像聚焦原理对其离子光学系统、离子源和质量分析器的物理参数及几何结构尺寸进行优化,研制了新型小型磁偏转质谱计,其质量为4.3 kg,体积为(220×164×162)mm^(3),功耗为25 W。对质谱计的质量范围、灵敏度、分辨能力、最小可检漏率和稳定性等性能指标开展实验研究。结果表明,该质谱计的质量范围为1~134 u,大通道和小通道50%峰高处的分辨能力分别为56和13,对氩气、氮气和氦气的灵敏度分别为1.63×10^(-4)、1.17×10^(-4)、2.3×10^(-5)A/Pa,最小可检漏率为1.24×10^(-10)Pa·m^(3)/s,仪器在3.5 h内的稳定性为2.5%。Miniaturization is one of the most important development directions of mass spectrometers as an analytical technique for in situ field analysis and space applications.However,miniaturization is often associated with performance limitations,such as smaller mass range,lower resolving power and sensitivity as compared to full laboratory and desktop systems.In our work,a theoretical model of the electric and magnetic field distribution of the ion optical system was established.Both theoretical simulation and experimental verification methods were used.Based on the methods,in-depth research was carried out on the interaction between miniaturization and high performance,the changes in ion transmission efficiency,mass discrimination effect,and ion motion trajectory of the instrument under the coupling of multiple parameters was revealed.According to the ion focusing principle,the physical parameters and structure dimensions of the ion optical system,ion source and mass analyzer were optimized,and a new miniature magnetic sector mass spectrometer was developed at the Lanzhou Institute of Physics.The compact instrument can be roughly divided into two parts of the physical unit and the electronic unit.The physical unit comprises an ion source,magnetic mass analyzer and two ion detectors.The total weight of this instrument is 4.3 kg,its dimensions are approximately(220×164×162)mm^(3),and the power consumption is 25 W.After optimization,the performance indicators have been improved compared with the instrument developed in 2012,including the sensitivity,resolving power,mass range and so on.The instrument key performance indexes were tested,and the research result showed that mass spectrometer can record mass range from 1 u to 134 u with two ion channels,and provide resolving power of about 56 and 13 for the large and small channel at full width half maximum(FWHM),and demonstrate a sensitivity of 1.63×10^(-4),1.17×10^(-4),2.3×10^(-5)A/Pa for argon,nitrogen and helium in the secondary electron multiplier(SEM)operating vol

关 键 词：磁偏转质谱计 小型化 灵敏度 分辨能力 最小可检漏率 稳定性 

分 类 号：O657.63[理学—分析化学]