微振动主动隔振系统的研究综述  

Review of active microvibration isolation system

作　　者：易思成 王金海 刘志刚 张泉[1] 杨斌堂[2] 孟光[2] YI Si-cheng;WANG Jin-hai;LIU Zhi-gang;ZHANG Quan;YANG Bin-tang;MENG Guang(School of Mechatronic Engineering and Automation,Shanghai University,Shanghai 200444,China;State Key Laboratory of Mechanical System and Vibration,Shanghai Jiao Tong University,Shanghai 200240,China;Shanghai Aerospace Control Technology Institute,Shanghai 201109,China)

机构地区：[1]上海大学机电工程与自动化学院,上海200444 [2]上海交通大学机械系统与振动国家重点实验室,上海200240 [3]上海航天控制技术研究所,上海201109

出　　处：《机电工程》2021年第3期265-275,共11页Journal of Mechanical & Electrical Engineering

基　　金：国家重点研发计划项目(2016YFB0501003);国家自然科学基金资助项目(11772185、61803258);上海市科技创新行动计划启明星项目(20QA1403900);上海市自然科学基金资助项目(19ZR1474000);上海市科技创新行动计划扬帆项目(20YF1417400)。

摘　　要：为降低外界微米至纳米范围微振动干扰对精密装置的影响,并提高精密装置的运行精度,研制了微振动隔振平台,并将振动主动控制技术应用于隔振系统中。在明确了微振动定义的基础上,阐述了精密仪器所允许的振源速度标准;基于隔振理论,总结了单自由度和多自由度微振动隔振系统的结构特点;在此基础上,对主动隔振系统中的驱动器进行了总结;考虑到系统的动力学和驱动特性,对结构和驱动器的建模方法进行了论述;基于隔振率、隔振稳定性等指标,对反馈、前馈、复合和新型振动主动控制方法进行了评价;通过对传感驱动一体化、振动能量回收、智能控制技术的分析,预测了微振动主动隔振系统的未来发展趋势。研究成果表明:相比于被动隔振,主动隔振技术具有灵活、高效等优点,基于智能材料(如压电、磁致伸缩)的新型微振动隔振系统得到了广泛的应用,相应的迟滞建模和补偿控制成为了该领域的研究热点。In order to reduce the impact of external microvibration interference on precision device and improve the operation accuracy of precision device,the active microvibration isolation system was developed,and the active vibration control technology was utilized in the vibration isolation system.The definition of microvibration was clarified.The criterion of permitted vibration source speed for precision instruments was explained.Based on the theory of vibration isolation,the structural characteristics of single-degree-of-freedom and multi-degree-of-freedom microvibration isolation systems were summarized.On this basis,the actuators in the active vibration isolation system were summarized.Accounting for the dynamics and actuator characteristics of the system,the modeling methods of the structure and the actuator were discussed.The active vibration control methods,including feedback,feedforward,hybrid and the advanced,were evaluated based on the indexes of vibration isolation ratio and stability.Through the analysis of actuator-sensor integration,vibration energy harvest,and intelligent control technology,the future development trend of active microvibration isolation system was predicted.Previous studies results show that comparing with passive vibration isolation,active vibration isolation technology is better in terms of flexibility and efficiency.Particularly,novel microvibration isolation systems based on smart materials(such as piezoelectric and magneto strictive)are widely used.The hysteresis modeling and compensation control methods of the smart material-based microvibration isolation system are extensively studied in this field.

关 键 词：微振动 主动控制 智能材料 驱动器 系统建模 迟滞 

分 类 号：TH707[机械工程—仪器科学与技术] TH113.1[机械工程—精密仪器及机械]