多参数协同调制的高分辨力直线时栅位移传感器  

High Resolution Linear Time Grating Displacement Sensor with Multi-parameter Synergy Modulation

作　　者：贺鹏 鲁进[1,2] 张兴红 张天恒[1] 谢述祥[1] HE Peng;LU Jin;ZHANG Xing-hong;ZHANG Tian-heng;XIE Shu-xiang(Chongqing University of Technology,Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing Key Laboratoryof Time-Grating Sensing and Advancedl Testing Technology,Chongqing 400054,China;College of Mechanical Engineering,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学,机械检测技术与装备教育部工程研究中心,时栅传感及先进检测技术重庆市重点实验室,重庆400054 [2]重庆理工大学机械工程学院,重庆400054

出　　处：《仪表技术与传感器》2021年第2期1-5,11,共6页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(51875069);重庆市教委科学技术研究项目(KJQN201801108);重庆理工大学研究生创新基金项目(YCX20192028)。

摘　　要：为了解决高精度的直线时栅位移传感器依赖空间超精密刻线和刻线不均匀等问题,提出一种采用多参数协同调制的新型直线时栅位移传感器。该传感器通过在PCB基板上布置阵列的激励线圈和特定形状的感应线圈,通过调制感应的面积和线圈的参数,感应出电行波信号,经过整形后用高频时钟脉冲插补得到位移量。通过仿真分析设计与样机实验,得出实验结果表明,在不改变空间极距的情况下,使得分辨力在信号源头上提高1倍且有±68μm的测量精度。In order to solve the problems of the high-precision linear time grating sensor,such as dependence on the space grid pitch ultra-precision score lines and unevenness of the score lines,a new linear time grating sensor using multi-parameter cooperative modulation was proposed.The sensor arranges the array of excitation coils and specific shape induction coils on the PCB substrate.By modulating the two parameters of the induction area and the coil,it induces an electric traveling wave signal.After shaping,the displacement is obtained by high-frequency clock pulse interpolation.Through simulation analysis design and prototype experiments,the experimental results show that the resolution can be doubled on the signal source and the measurement accuracy is±68μm without changing the spatial pole distance.

关 键 词：直线位移 阵列 多参数 高分辨力 

分 类 号：TP206[自动化与计算机技术—检测技术与自动化装置]