过渡层对片式开关型汽车氧传感器性能的影响  

Influence of transition layer on performance of chip switch type oxygen sensor for automobile

作　　者：刘洋 刘玺 文吉延 程振乾 LIU Yang;LIU Xi;WEN Jiyan;CHENG Zhenqian(The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150028,China)

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150028

出　　处：《传感器与微系统》2021年第3期37-39,共3页Transducer and Microsystem Technologies

摘　　要：设计并制备了一种过渡层浆料用于解决氧化锆氧传感器工艺过程中异质材料共烧结匹配问题,过渡层浆料作为的"粘合剂"使不同材料共烧结成一体提升了传感器层间结合强度,避免了由于材料收缩应力不一致引起的加热器层间开裂、空气腔室密闭不严等缺陷。氧传感器采用陶瓷高温共烧结(HTCC)工艺技术,经过流延、冲孔、印刷、叠片、切片、排胶、烧结工序制作而成,传感器具有响应时间短,使用寿命长的特点。设计制作的基于过渡层材料的氧化锆氧传感器经过测试,其响应时间由30ms缩短至11ms,上限输出值由280 m V提升至800 m V。A transition layer paste is designed and fabricated for solving zirconia oxygen sensor technology in the process of heterogeneous material sintering matching problem,transition layer pulp as the"glue"to make different material co-firing union,improve the bonding strength between the layers of sensor and avoided due to the material shrinkage stress caused by inconsistent heater interlayer defects such as crack,air chamber airtight is lax.The oxygen sensor adopts the HTCC process technology,and is made through the processes of flow casting,punching,printing,lamination,slicing,gluing and sintering.The sensor is characterized by short response time and long service life.The zirconia oxygen sensor designed and manufactured in this paper based on the transition layer material has been tested,and its response time is shortened from 30 ms to 11 ms,and the upper output value is promoted from 280 mV to 800 mV.

关 键 词：高温共烧结 氧气传感器 过渡层材料 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]