PZT驱动器非线性建模方法研究进展  

Research Progress of Nonlinear Modeling Methods for PZT

作　　者：高金海 高坤 韩孝强 GAO Jin-hai;GAO Kun;HAN Xiao-qiang(College of Aeronautical Engineering,Binzhou University,Binzhou 256603,China)

机构地区：[1]滨州学院航空工程学院,山东滨州256603

出　　处：《滨州学院学报》2020年第6期74-83,共10页Journal of Binzhou University

基　　金：滨州学院科研基金项目(2020Y32,BZXYLG2007)。

摘　　要：由于PZT驱动器及PZT驱动微动平台具有位移精度高、响应速度快、功耗低、可小型化等优点,在微纳米定位领域得到了广泛的应用。但其本身固有存在的迟滞/蠕变等非线性特性,给微操作机器人精密定位控制带来了极大挑战。传统控制策略不能有效消除非线性影响,而基于模型补偿控制方法更为有效,但是各种建模方法存在不足。通过分析PZT的迟滞非线性特性、蠕变非线性特性的各种建模方法,并讨论导致各种建模方法建模精度不高的原因,为PZT基于模型控制策略的选择及建模方法的发展提供参考依据。PZT driver and PZT driven micro-motion platform have been widely used in micro and nano-positioning because of their advantages such as high displacement accuracy,fast response speed,low power consumption and miniaturization.However,its nonlinear characteristics,such as hysteresis,brings great challenges to the precise positioning control of micro-manipulators.The traditional control strategy cannot effectively eliminate the nonlinear influence,while the model-based compensation control method is more effective,but there are shortcomings in various modeling methods.By analyzing various modeling methods of PZT′s hysteresis nonlinear characteristics and creep nonlinear characteristics,the reasons that lead to the low modeling accuracy of various modeling methods are discussed,which provides a reference for the choice of model-based control strategy and the development of modeling methods for PZT.

关 键 词：微操作机器人 精密定位 PZT 非线性 建模 

分 类 号：N93[自然科学总论]