超宽谱段高分辨率中阶梯光栅光谱仪的光学设计  

Optical design of echelle spectrometer with ultra-wide wavelength range and high resolution

作　　者：孙慈[1] 杨晋[1] 朱继伟 马婷婷 冯树龙[1] 宋楠[1] 郭雪强 郭汉洲 SUN Ci;YANG Jin;ZHU Ji-wei;MA Ting-ting;FENG Shu-long;SONG Nan;GUO Xue-qiang;GUO Han-zhou(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;Changchun SPKTRM Optronics Co.Ltd.,Changchun 130102,China;Changchun Guoke Medical Engineering Technology Development Co.Ltd.,Changchun 130102,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]长春长光格瑞光电技术有限公司,吉林长春130102 [3]长春国科医工科技发展有限公司,吉林长春130102

出　　处：《光学精密工程》2021年第1期45-53,共9页Optics and Precision Engineering

基　　金：国家重大科学仪器设备开发专项项目(No.2018YFF01011102);国家自然科学基金资助项目(No.61805240);吉林省科技发展计划资助项目(No.20180201049SF,No.20180201123GX,No.20180201122GX,No.20200403009SF);长春市科技计划资助项目(No.18DY003)。

摘　　要：为了实现超宽谱段与高分辨率特点兼具的中阶梯光栅光谱仪系统,提出了一种光路结构设计,并针对其深紫外波段的有效探测方法进行了研究及验证。该光路结构结合准Littrow结构与C-T结构的优势,保证了色散光路具备高衍射效率,同时很好地抑制了杂散光。在有限可选光学材料下,采用多重评价优化方式获得中阶梯光栅光谱仪的光学结构参数。通过加入由球透镜及柱透镜组成的校正结构,有效地校正了像差,提高了光谱分辨率。最后,针对深紫外波段探测的解决方案进行模态分析,验证了所设计方案的可行性。最终在160~1000 nm的超宽波段范围内,成像光斑的RMS值优于12.1μm,在257.61 nm处的光谱分辨率优于0.009 nm,能够满足超宽谱段、高分辨率检测系统的色散分光需求。In order to realize the echelle spectrometer system with ultra-wide wavelength range and high resolution,an optical path structure design was proposed,and the detection method of deep ultraviolet lights was studied and verified.Frist,the optical structure combined the advantages of quasi-littrow struc⁃ture and C-T structure,so as to ensure the dispersing path has the characteristics of high diffraction efficien⁃cy and the stray light was well suppressed.In the limited range of optional materials,the multi-optimization method was employed to design the optical parameters.In order to correct the aberration and improve the spectral resolution,a correction structure composed of spherical and cylindrical lenses was added.Final⁃ly,a solution to the detection of deep ultraviolet lights was proposed,and the feasibility of the scheme was verified by finite element analysis.The final design results indicates that in the wavelength range of 160-1000 nm,the imaging spot RMS value is better than 12.1μm,the spectral resolution of 257.61 nm is better than 0.009 nm.It can meet the dispersion demand of ultra-wide wavelength range and high resolu⁃tion detection system.

关 键 词：光学设计 中阶梯光栅光谱仪 超宽谱段 高分辨率 

分 类 号：O433[机械工程—光学工程] TH744.1[理学—光学]