基于飞行时间质谱计的微型气体分析仪技术研究  

Research of the Miniature Gas Analyzer Based on the Time-of-flight Mass Spectrometer

作　　者：韩琰[1] 闫荣鑫[1] 潘颖 王静涛[1] 李征[1] HAN Yan;YAN Rongxin;PAN Ying;WANG Jingtao;LI Zheng(Beijing Institute of Spacecraft Environment Engineering,Beijing 100094,China)

机构地区：[1]北京卫星环境工程研究所,北京100094

出　　处：《真空与低温》2021年第2期127-131,共5页Vacuum and Cryogenics

基　　金：深圳市基础研究项目(20150074);测试仪器替代研制项目(2006ZCTF0039)。

摘　　要：介绍了自主研发的微型气体分析仪的研究进展和设计思路。该分析仪计划应用于深空探索任务,以飞行时间质谱计为核心,配置了进样系统和抽气系统,应用了场发射离子源和离子反射镜技术,具有质量小(整机小于9 kg)、功耗低(整机功耗小于20 W)、测试质量数宽(amu=1~1000)、质量分辨本领强(大于400)、响应速度快、μs级全谱扫描周期、高检测浓度灵敏度等优点,可在高真空或低真空环境工作。质谱计质量小于2.5 kg,功耗低于5 W。The research progress and design ideas of self-developed miniature gas analyzer are introduced.The analyzer will be used in deep space exploration.Its main unit is time-of-flight mass spectrometer.The inlet systems and pumping systems are equipped.It uses some advanced technologies which include the field emission ion source and the ion mirror.It has some advantages which include the light weight(<9 kg),the low power(<20 W),the wide mass testing range(amu=1~1000),the high mass testing resolution(>400),the quick response speed,the short mass scan cycle time(30μs)and the high testing concentration sensitivity.This analyzer can be worked on high vacuum or low vacuum environment.This mass spectrometer’s weight is less than 2.5 kg,the power consumption is less than 5 W.

关 键 词：深空探索 微型气体分析仪 飞行时间质谱计 生命探索 

分 类 号：TB773[一般工业技术—真空技术]