Ⅱ类超晶格长波红外探测器研究进展  

Research Progress of Type-Ⅱ Superlattice Long-wave Infrared Detector

作　　者：邢伟荣 刘铭 温涛 周朋 胡雨农 XING Wei-rong;LIU Ming;WEN Tao;ZHOU Peng;HU Yu-nong(CETC Electro-Optics Technology Corporation Limited, Beijing 100015, China)

机构地区：[1]中电科光电科技有限公司,北京100015

出　　处：《红外》2021年第3期1-5,10,共6页Infrared

摘　　要：由于具有带隙可调、电子有效质量大、俄歇复合率低等特点,Ⅱ类超晶格在长波红外和甚长波红外探测方面具有独特优势。介绍了长波超晶格探测器制备方面的研究进展,包括能带结构设计、表面缺陷控制、周期结构控制和表面钝化。最后报道了320×256长波超晶格焦平面阵列及其测试性能。结果表明,在77 K工作温度下,该阵列的截止波长为9.6μm,平均峰值探测率D^(*)为7×10^(10)cm·Hz^(1/2)/W,噪声等效温差(Noise Equivalent Temperature Difference,NETD)为34 mK,响应非均匀性为7%。Due to the characteristics of tunable bandgap,large electron effective mass,and low Auger recombination rate,type-Ⅱ superlattices have unique advantages in long-wave and very long-wave infrared detection.The research progress in the preparation of long-wave superlattice detectors is introduced,including band structure design,surface defects control,periodic structure control and surface passivation.Finally,a 320×256 long-wave superlattice focal plane array and its test performance are reported.The results show that at an operating temperature of 77 K,the cut-off wavelength of the array is 9.6μm,the average peak detection rate D^(*)is 7×10^(10)cm·Hz^(1/2)/W,the noise equivalent temperature difference(NETD)is 34 mK,and the response non-uniformity is 7%.

关 键 词：Ⅱ类超晶格 长波 红外探测器 

分 类 号：TN215[电子电信—物理电子学]