(Mg_(0.527)Al_(0.473))(Al_(1.758)Mg_(0.126))O_(4)薄膜制备及其沿面耐压性能的研究  

Synthesisand Surface Flashover Behavior of (Mg_(0.527)Al_(0.473))(Al_(1.758)Mg_(0.126))O_(4) Thin Films

作　　者：刘伟[1] 黎明[1] 杜继实[1] LIU Wei;LI Ming;DU Jishi(Institute of Electronic Engineering,CAEP,Mianyang 621900,China)

机构地区：[1]中国工程物理研究院电子工程研究所,绵阳621900

出　　处：《真空科学与技术学报》2021年第1期40-43,共4页Chinese Journal of Vacuum Science and Technology

摘　　要：采用丝网印刷法在95%(质量比)Al_(2)O_(3)基板上制备MgO薄膜,在大气环境1650℃下烧结使MgO与Al_(2)O_(3)基板反应形成(Mg_(0.527)Al_(0.473))(Al_(1.758)Mg_(0.126))O_(4)薄膜(MAO)。通过X射线衍射仪、扫描电子显微镜、能谱仪、X射线光电子能谱仪和激光共聚焦显微镜分别对MAO薄膜的结构、微观形貌、成分和表面粗糙度进行了表征。利用沿面耐压测试仪器对比了MAO薄膜与不同粗糙程度Al_(2)O_(3)基板的沿面耐压强度。研究结果表明,该方法制备了纯度较高的MAO薄膜,当沿面绝缘距离为8 mm时,排除表面粗糙度对沿面耐压性能的影响下,MAO薄膜平均沿面耐压强度相比于Al_(2)O_(3)基板有了较大程度提升。The(Mg_(0.527)Al_(0.473))(Al_(1.758)Mg_(0.126))O_(4)(MAO) thin films were synthesized by solid-solid reaction,at 1650℃ and at atmospheric pressure,of the screen printed MgO coatings pre-covered on the 95 wt%Al_(2)O_(3) substrate.The microstructures,phase-structures and surface flashover behavior of the MAO thin films were characterized with X-ray diffraction,scanning electron microscope,energy dispersive spectrometry,X-ray photoelectron spectroscopy and laser confocal microscope.The results show that when it comes to surface insulation,the highly pure MAO coating outperforms the Al_(2)O_(3) substrate with different surface roughness.To be specific,excluding the impact of surface roughness and evaluated with the 8 mm gap of electrodes,the surface flashover voltage the MAO coating was found to be much higher than that of Al_(2)O_(3) plate.

关 键 词：(Mg_(0.527)Al_(0.473))(Al_(1.758)Mg_(0.126))O_(4)薄膜 微观结构 粗糙度 沿面电压 

分 类 号：TM215.3[一般工业技术—材料科学与工程]