基于VO_(2)热相变的光子晶体波导开关  

Photonic Crystal Waveguide Switch Based on VO_(2)Thermal Transformation

作　　者：刘海[1,2] 邵齐元 张砚曾 赵嘉 陈聪 白冰冰[1,2] LIU Hai;SHAO Qi-yuan;ZHANG Yan-zeng;ZHAO Jia;CHEN Cong;BAI Bing-bing(Engineering Research Center of Intelligent Control for Underground Space,Ministry of Education,China University of Mining and Technology,Xuzhou Jiangsu,221116;School of Information and Control Engineering,China University of Mining and Technology,Xuzhou Jiangsu,221116)

机构地区：[1]中国矿业大学地下空间智能控制教育部工程研究中心,江苏徐州221116 [2]中国矿业大学信息与控制工程学院,江苏徐州221116

出　　处：《电子科技大学学报》2021年第2期267-271,293,共6页Journal of University of Electronic Science and Technology of China

基　　金：国家自然科学基金(51874301)。

摘　　要：基于相变材料VO_(2),设计了一款光子晶体波导结构的光开关。通过在硅波导中填充SU-8包层对温度灵敏度做补偿,降低了波导开关的温度敏感特性。采用热驱动开关实现了1591 nm波长处约9.5 dB的消光比。同时提出一种新型级联波导来优化开关结构,实现了27.46 dB的消光比。A photonic crystal waveguide optical switch based on the phase-change materials VO_(2) is designed.Through plating the SU-8 cladding material onto the waveguide to compensate the temperature effect of the silicon waveguide,the temperature dependence of the waveguide switch can be reduced.An extinction ratio of approximately 9.5 dB is achieved at 1591 nm with a thermal actuation.In addition,a new cascaded grating is designed to optimize the switch structure and achieves an extinction ratio of 27.46 dB.

关 键 词：光学开关设备 光子晶体 热光效应 波导 

分 类 号：TN25[电子电信—物理电子学]