硅基阻挡杂质带红外探测材料与器件研究进展  

The research progress of Si-based blocked-impurity-band infrared detecting materials and detectors

作　　者：朱家旗 朱贺 徐翰纶 王垚 陈岩松 刘梦娟 吴惠桢[1] ZHU JiaQi;ZHU He;XU HanLun;WANG Yao;CHEN YanSong;LIU MengJuan;WU HuiZhen(State Key Laboratory of Silicon Materials,Department of Physics,Zhejiang University,Hangzhou 310027,China;College of Physics and Optoelectronic Engineering,Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,China)

机构地区：[1]浙江大学物理学系,硅材料国家重点实验室,杭州310027 [2]国科大杭州高等研究院物理与光电工程学院,杭州310024

出　　处：《中国科学：物理学、力学、天文学》2021年第2期46-66,共21页Scientia Sinica Physica,Mechanica & Astronomica

基　　金：国家自然科学基金(编号:61290305,U1737109,11933006)资助项目。

摘　　要：红外探测在天文物理研究领域具有极其重要的应用前景,由于天文深空探测对象的特殊性,对红外探测器的性能要求十分苛刻.阻挡杂质带(BIB)红外探测器,因其具有响应波段宽、噪声低、灵敏度高以及抗辐射性能好等优点,在过去30年中发展成为国际上天文领域首选的红外探测器.BIB红外探测器的探测波长覆盖中红外到远红外波段,它的推广应用促进人类在天文深空探测领域取得了一系列重大的科学成果.我国在BIB红外探测器的研究起步较晚,近年来也取得了较大进展,但是与国际领先水平相比尚有较大差距.本文主要回顾、评述了过去5年多我国在BIB红外探测器领域的研究进展,对BIB红外探测材料及其相应BIB器件的制备工艺、物性表征和光电响应特性,以及表面等离激元对器件光电响应的调控等做了详尽介绍,为我国BIB红外探测器的发展提供参考和实验依据.Infrared detection possesses a significantly application prospect in the field of astrophysics.Due to the special natures of deep-space exploring objects,the performance of infrared detector is very demanding.Blocked-impurity-band(BIB)infrared detectors,with advantages of wide spectrum coverage,low noise,high sensitivity,good resistance to cosmic particle radiation etc.,have become the state-of-the-art choice for astronomical application internationally.The response of BIB detectors ranges from mid-infrared to far-infrared waveband,and the widespread use of BIB detectors help human beings obtain a series of important scientific achievements in the field of deep-space exploration.The research on BIB infrared detector in China started rather late.Even though big progress has been achieved in recent years,it still lags far behind the advanced level globally.This article reviews the research progress for BIB infrared detectors of China in the past 5 years.The preparation technology,physical property characterization,photoelectric response characteristics of BIB infrared detection material and corresponding devices,and the control of surface plasmon polaritons on the photoelectric response of the detectors are introduced detailly.These provide references and experimental bases for the development of BIB infrared detector in China.

关 键 词：天文深空红外探测 阻挡杂质带探测器 垂直结构 平面结构 表面等离激元 

分 类 号：TN215[电子电信—物理电子学]