利用飞秒激光直写技术制备钙钛矿微盘激光器  

Perovskite Microdisk Laser Prepared by Femtosecond Laser Direct Writing

作　　者：田晓语 曹强 Tian Xiaoyu;Cao Qiang(The Institute of Technological Science,Wuhan University,Wuhan 430000,China)

机构地区：[1]武汉大学工业科学研究院,武汉430000

出　　处：《微纳电子技术》2021年第2期163-169,共7页Micronanoelectronic Technology

基　　金：中国科学院战略性先导科技专项(XDA25040201);中央高校基础研究基金资助项目(2042019kf0011)。

摘　　要：利用溶液法制备的钙钛矿微/纳米晶虽然可以得到性能良好的微型激光器,但是其所需生长周期较长且缺乏重复性。为了解决这一问题,提出了利用飞秒激光直写技术制备高重复性钙钛矿微盘激光器的新方法。首先使用双源共蒸的方法在石英玻璃衬底上沉积FAPbI_(3)钙钛矿薄膜,然后采用飞秒激光直写技术在FAPbI_(3)钙钛矿薄膜上制备不同直径的微盘激光器,最后测试其激光性能。实验结果表明,随着微盘直径的增加,激光阈值呈线性增长,最终可实现约4.7μJ/cm^(2)的极低激光阈值。利用飞秒激光直写技术制备的钙钛矿微盘激光器具有出色的激光性能,且重复性高,因此该技术非常适用于批量制备钙钛矿微盘激光器,为其产业化应用提供了可能。Although high performance micro-lasers can be fabricated with perovskite micro/nano crystals grown by the solution method,the growth period of perovskite micro/nano crystals is long and the growth process lacks reproducibility.A new method to fabricate high reproducibility lasers based on perovskite microdisks with the femtosecond laser direct writing was proposed to solve the problem.Firstly,the dual source co-evaporation method was used to deposit FAPbI_(3) perovskite film on a quartz glass substrate,and then the lasers of different microdisk diameters were fabricated on FAPbI_(3) perovskite films by femtosecond laser direct writing.Finally,the laser performance of the microdisks was tested.Experimental results show that as the diameter of the microdisk increases,the laser threshold increases linearly,and finally an extremely low laser threshold of about 4.7μJ/cm^(2) can be achieved.The perovskite microdisk laser prepared by the femtosecond laser direct writing has excellent laser performance and high repeatability,thus the femtosecond laser direct writing is very suitable for batch preparation of the perovskite microdisk laser and provides the possibility for its industrial application.

关 键 词：飞秒激光直写 双源共蒸 钙钛矿 微盘激光器 石英玻璃衬底 

分 类 号：TN365[电子电信—物理电子学]