激光跟踪仪检测大口径非球面方法研究  

Research on detection method of large-aperture aspheric surface by laser tracker

作　　者：陈佳夷[1] 王聪[1] 霍腾飞 程德级 CHEN Jiayi;WANG Cong;HUO Tengfei;CHENG Deji(Beijing Key Laboratory of Advanced Optical Remote Sensing Technology,Beijing Institute of Space Mechanics and Electricity,Beijing 100094,China;Hexagon Manufacturing Intelligence(Qingdao)Co.,Ltd.,Qingdao 266000,China)

机构地区：[1]北京空间机电研究所先进光学遥感技术北京市重点实验室,北京100094 [2]海克斯康制造智能技术(青岛)有限公司,山东青岛266000

出　　处：《应用光学》2021年第2期299-303,共5页Journal of Applied Optics

基　　金：国家重点研发计划地球观测与导航专项项目(2016YFB0500802)。

摘　　要：大口径非球面反射镜研磨阶段,在准确测试几何参数的同时,面形也要达到一定的精度要求。利用数值模拟测试过程的方式,评估了使用三坐标测量仪和激光跟踪仪轮廓检测几何参数及面形的精度。针对2m口径抛物镜的检测指标要求,提出了一种有效的轮廓检测方法。使用4台激光跟踪仪搭建了多边测量系统,采用Levenberg_Marquardt算法进行系统标定,利用新型靶球实现多台跟踪仪对镜面点的同步快速采集,对测试数据进行平差和坐标系转换处理,最终获取几何参数和面形。2m口径抛物镜研磨完成后进行了测试,顶点曲率半径、非球面系数、面形rms的误差分别为0.16mm、0.0006、1.06μm。In the grinding stage of large-aperture aspheric mirror,the geometric parameters should be measured accurately,and the surface shape should also meet certain accuracy requirements.By means of numerical simulation of the test process,the accuracy of measuring geometric parameters and surface shape using threecoordinate measuring machine(3-CMM)and laser tracker was evaluated.An effective contour detection method was proposed to meet the requirements of the detection index of a 2 m-aperture parabolic mirror.Four laser trackers were used to build a multilateral measurement system,the Levenberg_Marquardt algorithm was used to calibrate the system,the new target ball was used to realize the synchronous and rapid acquisition of mirror points by multiple trackers,and the test data were adjusted and coordinate system transformation was processed.Finally,the geometric parameters and surface shape were obtained.After grinding,the 2 m-aperture parabolic mirror was tested.The errors of vertex curvature radius,aspheric coefficient and surface shape RMS are 0.16 mm,0.0006 and 1.06μm,respectively.

关 键 词：大口径非球面 轮廓检测 激光跟踪仪 多边测量 

分 类 号：TN206[电子电信—物理电子学]