液体透镜的透射波前特性研究  

Study on characteristics of transmission wavefront of liquid lens

作　　者：卢佳玮 袁道成[1] 刘乾[1] LU Jiawei;YUAN Daocheng;LIU Qian(Institute of Machinery Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621000,China)

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621000

出　　处：《应用光学》2021年第2期339-345,共7页Journal of Applied Optics

基　　金：中国工程物理研究院院长基金(YZJJLX2017007)。

摘　　要：液体透镜是一种新型光学元件,通过改变表面曲率而调整光焦度。液体透镜的透射波前质量会影响成像质量,将液体透镜应用于精密光学系统需要探明其透射波前变化特性。通过理论和仿真分析液体透镜通光孔径内不同高度入射光线的光程差随曲率半径的变化,以及光程差对光焦度的敏感性,以此研究光瞳空间内光程差微变的一致性。分别测量液体透镜在零、正、负光焦度下的透射波前,通过分析实验数据验证液体透镜的光程差微变的一致性。实验结果表明:光程差微变的空间最大差异约为0.22λ~0.36λ,空间分布离散程度约为0.01λ~0.02λ,得出液体透镜随电流微变产生的光程差微变一致性较好,为液体透镜在精密光学系统中的应用和像差补偿提供了技术支撑。As a new optical element,the liquid lens provides adjustable optical power by changing the curvature.The transmission wavefront quality of liquid lens will affect the imaging quality.In order to apply liquid lens to precise optical system,it is necessary to investigate its transmission wavefront characteristics.The variation of the optical path difference(OPD)with the curvature radius,and the sensitivity of the OPD to the optical power in different heights of incident light in liquid lens aperture were analyzed by theory and simulation,so as to study the uniformity of slight variation of OPD in pupil.The transmission wavefront of liquid lens in zero,positive and negative optical power was measured.The uniformity of OPD variation of liquid lens was verified by analyzing the experimental data.The experimental results show that the spatial maximum difference of optical path difference variation is about 0.22λ~0.36λ,and the dispersion degree of spatial distribution is about 0.01λ~0.02λ.The analysis results show that the OPD variation of liquid lens with respect to the minor variation of electrical current has good uniformity,which can provide support for application and aberration compensation of liquid lens in precise optical system.

关 键 词：光学测量 液体透镜 透射波前 光程差 

分 类 号：TN206[电子电信—物理电子学]