Phase structure of sputtered Ta coating and its ablation behavior by laser pulse heating(LPH)  

作　　者：Yunsong Niu Lingling Xing Feng Yang Huawei Li Minghui Chen Shenglong Zhu Fuhui Wang 

机构地区：[1]Corrosion and Protection Division,Shenyang National Laboratory for Materials Science.Institute of Metal Research,Chinese Academy of Sciences,Shenyang,110016,China [2]College of Chemistry and Chemical Engineering,Shenyang Normal University,Shenyang,110034,China [3]School of Equipment Engineering,Shenyang Ligong University.Shenyang,110159,China [4]Corrosion and Protection Division,Shenyang National Laboratory for Materials Science,Northeastern University,Shenyang,110819,China

出　　处：《Journal of Materials Science & Technology》2021年第6期7-17,共11页材料科学技术（英文版）

基　　金：financial support of the project from the National Natural Science Foundation of China(No.51701223)。

摘　　要：Phase structure of sputtered Ta coating in the negative glow space and LPH effect were explored.The whole coating/substrate system is substrate→physically gas-absorbed Fe surface→oxygen-enriched TaOx layer→amorphous Ta→αandβdual phase→singleαphase.After LPH course,micro structure of Ta coating shows intact,only a few cracks emerge after 100 laser pulses,exhibiting thin HAZ but thick Fe/Ta ICZ,without martensitic transformation.For the electrodeposited Cr coating,continuous thermal stresses produce many extra micro-crack,substrate oxidation and martensitic transformation,leading to crack propagations and final bulk delamination,without any ICZ.

关 键 词：Sputtered Ta coating Phase structure Laser pulse heating Inter-connected zone(ICZ) Heat-affected zone(HAZ) Ablation 

分 类 号：TG174.4[金属学及工艺—金属表面处理] TG665[金属学及工艺—金属学]