A combined virtual impactor and field-effect transistor microsystem for particulate matter separation and detection  

作　　者：Yanna Li Muqing Fu Wei Pang Ye Chang Xuexin Duan 

机构地区：[1]State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China [2]School of Precision Instrument and Opto-Electronics Engineering,Tianjin University,Tianjin 300072,China

出　　处：《Nanotechnology and Precision Engineering》2021年第1期17-25,共9页纳米技术与精密工程（英文）

基　　金：supported by the National Natural Science Foundation of China(Nos.91743110,61674114,and 21861132001);the National Key R&D Program of China(Nos.2017YFF0204604 and 2018YFE0118700);Tianjin Applied Basic Research and Advanced Technology(No.17JCJQJC43600),the“111”Project(No.B07014);the Foundation for Talent Scientists of Nanchang Institute for Micro-technology of Tianjin University.

摘　　要：Ambient suspended particulate matter(PM)(primarily with particle diameter 2.5m or less,i.e.,PM2.5)can adversely affect ecosystems and human health.Currently,optical particle sensors based on light scattering dominate the portable PM sensing market.However,the light scattering method has poor adaptability to different-sized PM and adverse environmental conditions.Here,we design and develop a portable PM sensing microsystem that consists of a micromachined virtual impactor(VI)for particle separation,a thermophoretic deposition chip for particle collection,and an extended-gate field-effect transistor(FET)for particle analysis.This system can realize on-site separation,collection,and analysis of aerosol particles without being influenced by environmental factors.In this study,the design of the VI is thoroughly analyzed by numerical simulation,and mixtures of different-sized silicon dioxide(SiO2)particles are used in an experimental verification of the performance of the VI and FET.Considering the low cost and compact design of the whole system,the proposed PM analysis microsystem has potential for PM detection under a wide range of conditions,such as heavily polluted industrial environments and for point-of-need outdoor and indoor air quality monitoring.

关 键 词：Particulate matter MICROSYSTEM Virtual impactor 50%cutoff diameter Field-effect transistor 

分 类 号：X831[环境科学与工程—环境工程]