大矢高凸柱面的超精密车削轨迹计算方法研究  

Research on the calculation method of the ultra-precision turning trajectory of large-vector high-convex cylinders

作　　者：雷茸粮 李云[1,2] 林妩媚 张帅[1,2] 青建宏 唐林峰 Lei Rongliang;Li Yun;Lin Wumei;Zhang Shuai;Qing Jianhong;Tang Linfeng(Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China;Southwest Petroleum University,Chengdu,Sichuan 610500,China)

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]中国科学院大学,北京100049 [3]西南石油大学,四川成都610500

出　　处：《光电工程》2021年第3期49-55,共7页Opto-Electronic Engineering

摘　　要：阵列微结构光学元件广泛用于各种光束匀化场合,而常规的加工方法难以满足大矢高凸柱面阵列的精度要求。本文采用超精密车削成型法,分析了影响金刚石车削的主要因素,设计了顺序搜索法和二分搜索法寻找车削轨迹,并对比了两种方法的优缺点,结合Matlab软件用二分搜索法成功找到车削轨迹及数控程序,并在超精密车床上进行了车削实验,得到了表面轮廓误差在135 nm的大矢高阵列微结构。证明了二分搜索法能够准确获得车削轨迹,并且此法可同时适用于球面轮廓和非球面轮廓,具有重要的工程应用价值。Array microstructure optical elements are widely used in various beam homogenization occasions,but conventional processing methods cannot meet the accuracy requirements of large-sagittal convex cylindrical arrays.In this paper,the ultra-precision turning forming method is used to analyze the main factors affecting diamond turning,the sequential search method and the binary search method are designed to find the turning track,and the advantages and disadvantages of the two methods are compared.Furthermore,the binary search method is successfully found by combining the Matlab software turning trajectory and the numerical control program.As proof-of-concept demonstrations,turning experiments are carried on an ultra-precision lathe,and a large-vector high-array microstructure with a surface profile error of 135 nm is obtained.It proves that the force binary search method can accurately obtain the turning trajectory,and this method can be applied to both spherical and aspherical contours,showing important engineering application value.

关 键 词：大矢高阵列微结构 凸柱面 超精密车削 半径补偿 

分 类 号：O439[机械工程—光学工程]