95%Al_(2)O_(3)陶瓷的MoO_(3)体系低温金属化机理研究  

Study on Low-Temperature Metallization Mechanism of MoO_(3)System for 95%Al_(2)O_(3)Ceramics

作　　者：陈欣 杨洁[1] 黄刚[1] 陈弹蛋 向军[1] 李天涛[1] 刘平[1] CHEN Xin;YANG Jie;HUANG Gang;CHEN Dan-dan;XIANG Jun;Li Tian-tao;LIU Ping(Institute of Fluid Physics,CAEP,Mianyang 621900,China)

机构地区：[1]中国工程物理研究院流体物理研究所,四川绵阳621900

出　　处：《真空电子技术》2021年第1期62-66,83,共6页Vacuum Electronics

摘　　要：本文采用由MoO_(3)加活化剂组成的配方对氧化铝陶瓷进行低温金属化,通过对氧化铝陶瓷、金属化层的显微结构及元素的分布情况来探索氧化铝陶瓷的低温金属化机理。研究发现金属化层中大部分MoO_(3)还原成活性较好的Mo颗粒,Mo颗粒间相互烧结连通为主体金属海绵骨架,同时少量的Mo氧化物与MnO、Al_(2)O_(3)、SiO 2、CaO等形成玻璃熔体,MnO、Al_(2)O_(3)、SiO 2、CaO之间也会形成MnO-Al_(2)O_(3)-SiO_(2)-CaO系玻璃熔体,从而获得致密、Mo金属与玻璃熔体相互缠绕、包裹的金属化层。金属化层中的两种玻璃熔体先后渗透、扩散进入氧化铝陶瓷晶界从而实现陶瓷与金属化层之间的连接。金属化层中还原的Mo金属与Ni层之间形成Mo-Ni合金,从而实现Ni层与金属化层之间的结合。A formula composed of MoO_(3)and activator is used to metallize alumina ceramics at low temperature,and the low temperature metallization mechanism of alumina ceramics is explored through the microstructure and element distribution of alumina ceramics and metallization layers.The study shows that most of the MoO_(3)in the metallization layer is reduced to active Mo particles.The Mo particles are sintered and connected together to form the main metal sponge skeleton.At the same time,a small amount of Mo oxide forms a glass phase with MnO,Al_(2)O_(3),SiO 2,CaO,etc.MnO,Al_(2)O_(3),SiO_(2),CaO also form a glass phase of MnO-Al_(2)O_(3)-SiO_(2)-CaO.Therefore,a dense metallization layer of intertwined,wrapped Mo metal and glass phase is developed.The two glasses melt in the metallization layer and then infiltrate and diffuse into the alumina ceramic grain boundary successively to achieve connection of the ceramic and the metallization layer.Mo-Ni alloy is formed by the reduced Mo in the metallization layer and the Ni layer,thereby achieving bonding of the Ni layer and the metallization layer.

关 键 词：低温金属化 95%Al_(2)O_(3)陶瓷陶瓷 活化剂 玻璃相 

分 类 号：TB756[一般工业技术—真空技术]