直径3英寸钆镓石榴石晶体生长及性能研究  

Growth and properties of gadolinium gallium garnet crystal with 3 inches diameter

作　　者：程毛杰 张会丽 董昆鹏 权聪 胡伦珍 韩志远 孙敦陆[1,3] CHENG Maojie;ZHANG Huili;DONG Kunpeng;QUAN Cong;HU Lunzheng;HAN Zhiyuan;SUN Dunlu(Crystal Material Laboratory,Anhui Institute of Optics and Fine Mechanics,Hefei Institutes of Physical Science,Chinese Academy of Sciences,Hefei 230031,China;University of Science and Technology of China,Hefei 230026,China;Advanced Laser Technology Laboratory of Anhui Province,Hefei 230037,China)

机构地区：[1]中国科学院合肥物质科学研究院安徽光学精密机械研究所晶体材料研究室,安徽合肥230031 [2]中国科学技术大学,安徽合肥230026 [3]安徽省先进激光技术实验室,安徽合肥230037

出　　处：《量子电子学报》2021年第2期160-166,共7页Chinese Journal of Quantum Electronics

基　　金：国家自然科学基金面上项目,51872290;安徽省自然科学基金,1908085QE176。

摘　　要：采用熔体提拉法,通过设计合理的晶体生长温场结构和优化生长气氛等,有效抑制了镓挥发,结合原料预处理及缩颈等工艺,成功生长出了高质量的直径3英寸Gd_(3)Ga_(5)O_(12)(GGG)晶体。对其晶体结构、结晶质量、位错形貌及透过光谱等进行了详细研究。X射线粉末衍射(XRD)表明该晶体为单相且晶格常数为1.2379 nm;(111)结晶面的X射线摇摆曲线(XRC)显示晶体具有较好的结晶质量;原子力显微镜(AFM)测量晶体(111)抛光片的表面粗糙度约为0.203 nm;观察分析了晶体(111)结晶面的位错腐蚀坑,位错密度为28∼85个/cm^(2);透过光谱显示晶体具有较宽的透光波段,并拟合出了塞米尔方程系数。结果表明生长的三英寸GGG晶体可以作为磁光外延膜的衬底材料和激光基质,并且较大的尺寸能够有效提高晶体使用的取材效率和一致性。As the gallium volatilization is effectively inhibited by designing suitable temperature field structure and optimizing the growth atmosphere,a diameter of 3 inches Gd_(3)Ga_(5)O_(12)(GGG)crystal with high quality is successfully grown by Czochralski method with the combining of raw material pretreatment and necking technology.And the crystal structure,crystalline quality,dislocation morphology and transmission spectrum are investigated in detail.The X-ray diffraction(XRD)shows that the as-grown crystal is single phase and the lattice constant is 1.2379 nm.The X-ray rocking curve(XRC)exhibits that the crystal possesses high crystalline quality.The surface roughness of(111)crystal surface is measured to be about 0.203 nm by atomic force microscopy(AFM).The dislocation corrosion pits on the crystal surface(111)are observed and analyzed,and it shows that the dislocation density ranges from 28/cm^(2) to 85/cm^(2).The transmission spectrum indicates that the crystal has wide transmittance band and the Sellmeier equation coefficients are fitted.All the results indicate that the 3 inches GGG crystal can be applied as the substrate material of the magneto-optical epitaxial film and laser host,and larger-size crystal can effectively improve the utilization efficiency and homogeneity.

关 键 词：材料 3英寸GGG晶体 磁光衬底 晶体质量 表面形貌 位错 透过谱 

分 类 号：O782[理学—晶体学]