基于动态温度调制的氧化锌纳米气体传感器敏感特性分析  

Sensitivity Analysis of ZnO Nanometer Gas Sensor Based on Dynamic Temperature Modulation

作　　者：苑振宇 类延峰 董慧 孟凡利 YUAN Zhen-yu;LEI Yan-feng;DONG Hui;MENG Fan-li(School of Information Science&Engineering,Northeastern University,Shenyang 110819,China)

机构地区：[1]东北大学信息科学与工程学院,辽宁沈阳110819

出　　处：《东北大学学报（自然科学版）》2021年第4期469-477,共9页Journal of Northeastern University(Natural Science)

基　　金：国家自然科学基金资助项目(61973058).

摘　　要：采用水热法制作了纳米氧化锌气敏材料,分析了双溶剂洗涤和水洗涤下的成品形貌,并采用传统的静态测试方法测试了灵敏度、稳定性及响应/恢复时间等特性参数.针对金属氧化物气体传感器的选择性和稳定性问题,基于静态测试,提出了一种新颖的动态温度调制测试方法.系统研究了不同波形(三角波、矩形波及梯形波)下传感器的响应,并分析了三角波下对称性的影响及基于梯形波下干扰气体和幅值对传感器响应的影响.研究成果可为人工智能产业前端的精确感知器件提供技术基础.The nano-ZnO gas-sensing material was produced by the hydrothermal method,and the morphology of the finished product under two-solvent washing and water washing was analyzed.The sensitivity,stability and response/recovery time and other characteristic parameters were tested by the traditional static test methods.Aiming at the selectivity and stability of metal oxide gas sensors,a novel dynamic temperature modulation test method was proposed based on the static test.The response of sensors under different waveform(triangular wave,rectangular wave,and trapezoidal wave)was systematically studied,and the influence of symmetry under triangular wave and the influence of interfering gas and amplitude based on trapezoidal wave on sensor response were analyzed.The research results can provide the technical foundation for accurate sensing devices in the front of artificial intelligence industry.

关 键 词：气体传感器 半导体金属氧化物 氧化锌 动态温度调制 波形分析 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]