基于HTCC敏感芯体SnO_(2)薄膜NO_(2)传感器  

SnO_(2) thin film NO_(2) gas sensor based on HTCC sensitive core

作　　者：杨永超 刘洋[1] 王大兴 程振乾 皮倩倩 刘玺 YANG Yongchao;LIU Yang;WANG Daxing;CHENG Zhenqian;PI Qianqian;LIU Xi(The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150028,China;Harbin Institute of Technology,Harbin 150001,China)

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150028 [2]哈尔滨工业大学,黑龙江哈尔滨150001

出　　处：《传感器与微系统》2021年第4期90-92,95,共4页Transducer and Microsystem Technologies

摘　　要：采用高温共烧陶瓷(HTCC)技术设计制备半导体气体传感器敏感芯体。敏感芯体分为两层结构:加热层和叉指电极层。运用磁控溅射技术在叉指电极层制备SnO_(2)薄膜敏感层,制成气体传感器。对气体传感器进行测试,结果表明:传感器在300℃工作温度下对NO_(2)表现出优异的气敏性能,可实现(10~200)×10-6范围内NO_(2)快速响应,100×10-6 NO_(2)灵敏度高达32.3,响应/恢复时间为2.2/2.6 s,且传感器一致性较佳。High-temperature co-fired ceramics(HTCC)technology is used to design and fabricate the sensitive core of the semiconductor gas sensor.The sensitive core has a two-layer structure,that is,the heating layer and the interdigital electrode layer.Magnetron sputtering technology is ueed to fabricate SnO_(2) thin film sensitive layer on the interdigital electrode layer to make the gas sensor.Gas sensing performance test is carried out.Results of the gas sensor show that the sensor has excellent gas sensitivity to NO_(2) gas at a working temperature of 300℃,which can achieve quick response in the volume fraction range of(10~200)×10-6 of NO_(2) gas,the sensitivity is as high as 32.3 at 100×10-6 volume fraction,and the response/recovery time is 2.2/2.6 s.The consistency of sensors is good.

关 键 词：高温共烧陶瓷(HTCC) SnO_(2)薄膜 NO_(2)传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]