基于激光干涉仪数字信号解码的振动校准方法  

Vibration Calibration Method Based on the Decoding of Heterodyne Interferometer Output S/PDIF Digital Signal

作　　者：王朝 蔡晨光[2] 杨明 孔明 郭天太 王道档 WANG Zhao;CAI Chen-guang;YANG Ming;KONG Ming;GUO Tian-tai;WANG Dao-dang(Collage of Metrology&Measurement Engineering,China Jiliang University,Hangzhou,zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China;The Electrical Engineering College,Guizhou University,Guiyang,Guizhou 550025,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院,北京100029 [3]贵州大学电气工程学院,贵阳550025

出　　处：《计量学报》2021年第3期282-286,共5页Acta Metrologica Sinica

基　　金：国家重点研发计划资助(2017YFF0205003)。

摘　　要：提出了一种基于Polytec外差激光干涉仪输出S/PDIF数字信号解码的加速度计校准方法,优化了校准过程,并保障了加速度计的灵敏度幅值与相位校准精度。通过与ISO 16063-11推荐的外差激光干涉法在5 Hz~20 kHz频率范围内的校准结果对比,提出方法的灵敏度幅值相对误差与相位差分别小于0.969%和0.165°;灵敏度幅值相对标准差与相位标准差分别小于0.560%和0.356°。An accelerometer calibration method based on Polytec heterodyne interferometer output S/PDIF digital signal decoding is proposed,which optimizes the calibration process and guarantees the sensitivity magnitude and phase calibration accuracy of the accelerometer. Comparing with the calibration results of the heterodyne interferometry recommended by ISO16063-11 in the frequency range from 5 Hz ~ 20 kHz,the relative error of sensitivity magnitude and difference of sensitivity phase by the proposed method are less than 0. 969% and 0. 165° respectively;the relative standard deviation of sensitivity magnitude and the standard deviation of sensitivity phase are less than 0. 560% and 0. 356° respectively.

关 键 词：计量学 振动计量 外差激光干涉法 S/PDIF 数字信号解码 加速度计校准 

分 类 号：TB936[一般工业技术—计量学]