极紫外、X射线和中子薄膜光学元件与系统  

Extreme Ultraviolet, X-Ray and Neutron Thin Film Optical Components and Systems

作　　者：王占山[1] 黄秋实[1] 张众[1] 伊圣振[1] 李文斌[1] 沈正祥[1] 齐润泽 余俊[1] Wang Zhanshan;Huang Qiushi;Zhang Zhong;Yi Shengzhen;Li Wenbin;Shen Zhengxiang;Qi Runze;Yu Jun(Key Laboratory of Ad vanced Micro-Structured Materials,Ministry of Education,Institute of Precision Optical Engineering,Schoo of Physics Science and Engineering,Tongji University,Shanghai 200092,China)

机构地区：[1]同济大学物理科学与工程学院先进微结构材料教育部重点实验室,精密光学工程技术研究所,上海200092

出　　处：《光学学报》2021年第1期430-448,共19页Acta Optica Sinica

基　　金：国家自然科学基金(61621001,U1731242,12075170,11875202);国家重点研发计划(2016YFA0401304);上海市青年科技启明星计划(19QA1409200);上海市市级科技重大专项资助课题(2017SHZDZX02);上海市科委科技基金项目(17JC1400800)。

摘　　要：极紫外、X射线和中子光学为现代科学的发展提供了高精度的观测手段,但这些手段的实现需要大量高性能薄膜光学元件和系统的支撑。由于短波长和材料光学常数的限制,短波光学元件的结构、性能和制作技术明显区别于长波光学元件。近二十年来,同济大学精密光学工程技术研究所建立了以短波反射镜为基底的精密加工检测平台,发展了超薄薄膜界面生长调控方法和大尺寸薄膜镀制技术,提出了高效率/高分辨率多层膜微纳结构的衍射理论和制备方法,初步阐明了短波辐照损伤的物理机制,形成了短波薄膜和晶体聚焦成像系统的高精度全流程研制技术,并将该技术成功应用于国内和国际短波光子大科学装置中。本文简要介绍本课题组在上述短波元件和系统领域中的研究进展。Extreme ultraviolet, X-ray and neutron optics are the high-precision observation methods for the development of modern science, which requires the support of different thin film optical components and systems with high quality. Due to the limitation of the short wavelength and optical constants of materials, the structure, optical performance and fabrication techniques of the short wavelength optical components are significantly different with those of the long wavelength optical components. The Institute of Precision Optical Engineering(IPOE) in Tongji University had 20 years research experience in this field. We have built a high-accuracy fabrication and detection platform based on the short wavelength mirrors, developed interface engineering methods for deposition of ultrathin multilayer film, extended the coated technology of large size mirrors, innovated the diffraction theory and fabrication process for high-efficiency/high-resolution multilayer nanostructures, preliminarily studied the basic damage mechanism of the mirrors under short wavelength irradiation, and formed a complete technology chain to develop thin films and crystal based optical systems. These optical components and systems have achieved a series of successful application in the short wavelength photon/neutron science facilities, both in China and in other countries. This paper will briefly introduce the recent research progress of the above mentioned optical components and systems in IPOE.

关 键 词：极紫外、X射线、中子射线 薄膜 光栅 聚焦成像系统 加工 损伤 

分 类 号：O434[机械工程—光学工程]