空间整形飞秒激光图案化加工氧化石墨烯  

Patterned Graphene Oxide by Spatially-Shaped Femtosecond Laser

作　　者：郭恒 闫剑锋[1] 李欣[2] 曲良体 Guo Heng;Yan Jianfeng;Li Xin;Qu Liangti(Department of Mechanical Engineering,Tsinghua University,Beijing 100084,China;School of Mechanical Engineering,Beijing Institute of Technology,Beijing 100081,China;Department of Chemistry,Tsinghua University,Beijing 100084,China)

机构地区：[1]清华大学机械工程系,北京100084 [2]北京理工大学机械车辆学院,北京100081 [3]清华大学化学系,北京100084

出　　处：《中国激光》2021年第2期292-300,共9页Chinese Journal of Lasers

基　　金：国家重点研发计划(2017YFB1104300);国家自然科学基金(51775303,52075289)。

摘　　要：氧化石墨烯(GO)是结构中含有部分含氧官能团的石墨烯衍生物,通过加热、化学反应和激光诱导等方法,该材料可以被还原。激光辐照可以诱导一定区域内的GO发生还原反应,具有灵活、区域选择性良好、无需特殊环境等优点。提出了一种基于空间整形的飞秒激光图案化加工GO的方法,即空间整形激光辐照法,分别采用空间整形激光辐照法和激光逐点扫描法在GO上加工图案,并对加工结果进行表征和对比,分析了辐照时间、激光通量等参数对加工结果的影响。结果表明空间整形激光辐照法可以图案化加工GO并使加工区域的GO被还原,从而提高图案化加工效率,且该方法具有良好的可重复性和图案灵活性,在制备GO基底的微电路、微器件方面具有应用潜力。Objective Graphene oxide(GO)is a graphene derivative with oxygen-containing functional group in its graphite structure.It can be reduced by heat,chemical reaction,and laser-induced reduction methods.Laser irradiation can induce reduction of GO in the irradiation area with good flexibility and area selectivity,and no special environment is required.In this paper,we propose a patterning method to process GO using a spatially-shaped femtosecond laser.We use the spatially-shaped laser irradiating method and a Gaussian laser scanning method to fabricate patterns on GO,and we analyze the effects of irradiation time,laser fluence,etc.The characteristic results demonstrate that the spatially-shaped femtosecond laser irradiating method realizes reductive patterning on GO,and the efficiency of patterning is improved.The proposed method also demonstrates good repeatability and flexibility in patterning.It has application potential in fabricating GO-based microcircuits and microdevices.Methods GO films were prepared by filtering GO dispersion with a cellulose filter membrane and drying.The femtosecond laser has an 800-nm central wavelength,35-fs pulse duration,and 1-kHz repetition rate.Different holograms were loaded on a spatial light modulator(SLM)to obtain the corresponding optical field at the focus.The Gerchberg-Saxon algorithm was used to calculate the phase distribution(i.e.,hologram)according to the targeted complex amplitude distribution.When the specific optical field shape at the back focal plane of lens was obtained,the 4 foptical system was used to guarantee that laser propagates without distortion and focuses on the surface of GO by the 5×objective lens.To realize unshaped laser scanning and compare fabrication results of shaped laser irradiating,aplane phase hologram was loaded on the SLM.Under this condition,an unshaped Gaussian optical field was formed at the focus.After reductive patterning,a scanning electron microscope(SEM)was used to characterize the micromorphology of the patterned areas to confirm the

关 键 词：激光技术 飞秒激光 空间光整形 氧化石墨烯 图案化加工 

分 类 号：TN249[电子电信—物理电子学]