Robot-aided fN∙m torque sensing within an ultrawide dynamic range  

作　　者：Shudong Wang Xueyong Wei Haojian Lu Ziming Ren Zhuangde Jiang Juan Ren Zhan Yang Lining Sun Wanfeng Shang Xinyu Wu Yajing Shen 

机构地区：[1]State Key Laboratory for Manufacturing Systems Engineering,Xi’an Jiaotong University,Xi’an 710049,China [2]Mechanical and Biomedical Engineering Department,City University of Hong Kong,Hong Kong SAR 999077,China [3]Department of Mechatronics,Chang’an University,Xi’an 710054,China [4]Robotics and Microsystems Center,Soochow University,Suzhou 215021,China [5]Shenzhen Institutes of Advanced Technology,Chinese Academy of Sciences,Shenzhen 518055,China [6]Shenzhen Research Institute,City University of Hong Kong,Shenzhen 440305,China

出　　处：《Microsystems & Nanoengineering》2021年第1期51-61,共11页微系统与纳米工程（英文）

基　　金：supported by the National Key R&D Program of China(No.2018YFB2002303);the National Natural Science Foundation of China(Nos.52075432,61922093,U1813211,6207330);Hong Kong RGC General Research Fund CityU(11211720);ShenZhen(China)Key Basic Research Project(No.JCYJ20200109114827177).

摘　　要：In situ scanning electron microscope(SEM)characterization have enabled the stretching,compression,and bending of micro/nanomaterials and have greatly expanded our understanding of small-scale phenomena.However,as one of the fundamental approaches for material analytics,torsion tests at a small scale remain a major challenge due to the lack of an ultrahigh precise torque sensor and the delicate sample assembly strategy.Herein,we present a microelectromechanical resonant torque sensor with an ultrahigh resolution of up to 4.78 fN∙m within an ultrawide dynamic range of 123 dB.Moreover,we propose a nanorobotic system to realize the precise assembly of microscale specimens with nanoscale positioning accuracy and to conduct repeatable in situ pure torsion tests for the first time.As a demonstration,we characterized the mechanical properties of Si microbeams through torsion tests and found that these microbeams were five-fold stronger than their bulk counterparts.The proposed torsion characterization system pushes the limit of mechanical torsion tests,overcomes the deficiencies in current in situ characterization techniques,and expands our knowledge regarding the behavior of micro/nanomaterials at various loads,which is expected to have significant implications for the eventual development and implementation of materials science.

关 键 词：TORSION PRECISE dynamic 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]