基于微电铸工艺的摩擦接触式微型惯性开关  

A Frictional Contact MEMS Inertial Switch Based on Micro Electroforming Technology

作　　者：杜立群[1,2] 杨晓臣 于洋[2] 王胜羿 刘蓬勃 赵剑[3] DU Liqun;YANG Xiaochen;YU Yang;WANG Shengyi;LIU Pengbo;ZHAO Jian(Key Laboratory for Precision and Non-Traditional Machining Technology of the Ministry of Education,Dalian University of Technology,Dalian 116024,China;Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology,Dalian 116024,China;School of Automotive Engineering,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室,大连116024 [2]大连理工大学辽宁省微纳米及系统重点实验室,大连116024 [3]大连理工大学汽车工程学院,大连116024

出　　处：《航空制造技术》2021年第6期66-72,81,共8页Aeronautical Manufacturing Technology

基　　金：国家自然科学基金(51975103,61874019)。

摘　　要：针对微型惯性开关闭合时间短、接触弹跳问题,设计了增强接触效果的摩擦接触式微型惯性开关。基于MEMS惯性开关工作原理,建立了开关物理模型,研究了不同类型惯性开关的闭合性能,提出了增强接触的摩擦接触方法,设计了摩擦接触式微型惯性开关的结构。为了对比接触性能,基于UV–LIGA叠层光刻和精密微电铸工艺,研制了3种不同类型的惯性开关。最后,进行落锤试验,测试结果显示:施加400g外载加速度时,刚性、柔性、摩擦接触式微型惯性开关的闭合时间分别为10μs、80μs、620μs;在惯性开关中引入摩擦电极,既能延长闭合时间,又能解决弹跳问题。研究结果表明,摩擦接触式微型惯性开关在增强接触效果方面具有很大的优越性。This paper presents a frictional contact MEMS inertial switch to solve the problem of short contact duration and bounce effect of inertial switch.The closing principle of the switch was theoretically analyzed and modeled.A method of enhancing the contact effect by frictional contact was proposed and the switch was designed based on that method.In order to compare the contact performance between frictional contact MEMS inertial switch and other switches,three kinds of inertia switches were fabricated by using UV-LIGA multilayer photolithography and precision micro electroforming.Finally,switches were tested by a standard dropping hammer system and the contact duration of the three switches were obtained.The tested results show that the contact duration of rigid,flexible and frictional contact MEMS inertial switches is 10μs,80μs and 620μs respectively when applied 400g external acceleration.Both rigid and flexible contact MEMS switches have contact bounce,while frictional contact switches close stably without bounce.The frictional contact MEMS inertial switch has great advantages in enhancing the contact effect.

关 键 词：MEMS惯性开关 弹跳 闭合时间 摩擦接触 微电铸工艺 

分 类 号：TM564[电气工程—电器]