原位液相透射电子显微镜及其在 纳米粒子表征方面的应用  

In-situ liquid phase transmission electron microscope and its application in nanoparticle characterization

作　　者：刘玄玄 国洪轩 徐涛 尹奎波[1,2,3] 孙立涛 Liu Xuan-Xuan;Guo Hong-Xuan;Xu Tao;Yin Kui-Bo;Sun Li-Tao(Key Lab of MEMS of Ministry of Education,School of Electronic Science and Engineering,Southeast University,Nanjing 210096,China;FEI Nano-Pico Center,Southeast University,Nanjing 210096,China;School of Microelectronics,Southeast University,Wuxi 214000,China)

机构地区：[1]东南大学电子科学与工程学院,MEMS教育部重点实验室,南京210096 [2]东南大学FEI纳皮米中心,南京210096 [3]东南大学微电子学院,无锡214000

出　　处：《物理学报》2021年第8期286-300,共15页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:11874105);国家杰出青年科学基金(批准号:11525415)资助的课题

摘　　要：近年来,基于透射电子显微技术、微纳加工技术和薄膜制造技术的发展,原位液相透射电子显微技术产生,为构建多种纳米级分辨率尺度下的微实验平台,发展新型纳米表征技术和众多领域的相关研究提供了途径.本文首先介绍了应用于原位液相透射电子显微技术的液体腔设计要求,然后介绍了液体腔的发展和典型的制备工艺,最后综述了近年来液体腔透射电子显微镜在纳米粒子成核和生长方面的应用研究,并探讨了该技术前沿发展面临的机遇和挑战.本文将为提高我国先进纳米表征技术和原子精准构筑技术提供相关讨论和支持.Based on the improvement of transmission electron microscope(TEM),nano fabrication,and film deposition,and with the development of the in-situ liquid TEM and nano characterization platform,various relevant nano researches have been carried in different fields.In this article,the principle,basic design requirements,development and typical preparation technologies of the liquid cell are briefly introduced.Subsequently,the state-of-the-art applications of liquid cell transmission electron microscope in the nucleation and growth of nanoparticles are reviewed.Finally,the opportunities and challenges faced by the frontier development of this technology are also discussed.This article provides constructive discussion about and support for advanced nano characterization technology and precise manipulation of atomic structures.

关 键 词：原位液相透射电子显微镜 纳米表征技术 原位液体腔 

分 类 号：TB383.1[一般工业技术—材料科学与工程] TN16[电子电信—物理电子学]