四米槽式太阳能真空集热管镀膜设备的发展概述  

Development of Coating Equipment for Four Meter Trough Vacuum Solar Collector

作　　者：陈志涛 CHEN Zhi-tao(Dezhou Jinduo Vacuum Coating Technology Co.,Ltd.,Dezhou 253400,China)

机构地区：[1]德州金铎真空镀膜技术有限公司,山东德州253400

出　　处：《真空》2021年第2期20-26,共7页Vacuum

摘　　要：本文主要介绍了制备四米槽式太阳能真空集热管的间歇式单体镀膜机和自动连续镀膜线,对两种类型设备的优缺点和存在的问题进行了对比分析,可以为其他行业镀膜设备的设计改进提供借鉴。This article mainly introduces the preparation of four-meter long slot solar vacuum tube-a monomer intermittent coating machine and automatically continuous coating line. We carried out the comparative analysis on the various types of equipment with emphasis on the advantages and disadvantages of the existing problems. It can provide certain reference for the development of other industries coating equipment and design improvement.

关 键 词：光热发电 槽式太阳能真空集热管 圆柱磁控溅射靶 平面磁控溅射靶 

分 类 号：TB43[一般工业技术] TB75