真空钎焊系统内材料出气对压升率的影响研究  

Study on Effect of Material Outgassing on the Pressure Rise Rate in Vacuum Brazing System

作　　者：石扬 解永强 武春晖 暴翔 王成君 王永卿 赵兴亮 SHI Yang;XIE Yong-qiang;WU Chun-hui;BAO Xiang;WANG Cheng-jun;WANG Yong-qing;ZHAO Xing-liang(The Second Research Institute of China Electronics Technology Group Corporation,Taiyuan 030024,China)

机构地区：[1]中国电子科技集团公司第二研究所,山西太原030024

出　　处：《真空》2021年第2期42-47,共6页Vacuum

摘　　要：随着微电子封装向小型化、高密度化、高可靠性的方向发展,各行业对钎焊技术提出了高钎透率、高钎焊接头质量、材料具备高净化度等需求。高真空钎焊技术也随之日益普及、加速发展。该技术通过保障真空室的洁净度及焊接真空度,进而保障元器件的焊接质量及寿命。高真空钎焊技术要求真空钎焊炉具备高真空度、低压升率。高温下材料出气是高真空状态下炉体内的主要气源,直接影响着保真空时间。针对已组装完成的真空钎焊炉,本文进行了炉体材料表面放气、炉体压升率的理论研究计算;实际测试了真空钎焊炉所能达到的真空度及压升率;详细分析了高温下炉体材料表面出气特性;分析了不同温度对材料放气的影响;建立了一种材料放气-压升率模型,以期更好地指导真空钎焊炉设计。With the development of miniaturization,high density and high reliability of microelectronic packaging, various industries have put forward the requirements of high penetration rate,high quality of brazed joints and high cleanliness of materials for brazing technology. High vacuum brazing technology is becoming more and more popular with accelerating development. Such technology ensures the cleanness of vacuum chamber and welding vacuum degree, and then guarantees the welding quality and service life of components. High vacuum brazing technology requires high vacuum and low pressure rise rate.The outgassing of materials at high temperature is the main gas source in the furnace under high vacuum condition, which directly affects the vacuum holding time. In view of the assembled vacuum brazing furnace, the theoretical research and calculation of the outgassing of the furnace material surface and the pressure rise rate of the furnace body are carried out. The vacuum degree and pressure rise rate that vacuum brazing furnace can achieve are tested. The outgassing characteristics of material surface at high temperature are analyzed in detail. The influence of different temperature on the outgassing of materials is analyzed. A model of out gassing pressure rise rate of materials is established, in order to better guide the design of vacuum brazing furnace.

关 键 词：高真空 压升率 烘烤 材料放气 真空钎焊 

分 类 号：TB751[一般工业技术—真空技术] TB741