一种高精度CMOS温度传感器自动校准方法  

An Automatic Calibration Method for High Precision CMOS Temperature Sensor

作　　者：毋天峰 白忠臣[2] 张学恒 秦水介 WU Tianfeng;BAI Zhongchen;ZHANG Xueheng;QIN Shuijie(College of Big Data and Information Engineering,Guizhou University,Guiyang 550025,China;Guizhou Key Laboratory of Optoelectronic Technology and Application,Guiyang 550025,China)

机构地区：[1]贵州大学大数据与信息工程学院,贵阳550025 [2]贵州省光电子技术及应用重点实验室,贵阳550025

出　　处：《微处理机》2021年第2期6-9,共4页Microprocessors

基　　金：贵州省科技支撑计划(SY[2017]2887号);贵州省科技项目(黔科合平台人才[2018]5616)。

摘　　要：CMOS温度传感器的正常运转需要通过校准来获得高的精确度,而目前可用的校准技术大多是手工操作,既耗时又昂贵,难以适应芯片批量生产的需求。为解决这一问题,基于逐次逼近算法,提出一种用于CMOS温度传感器的自动校准方法,并在Global Foundries 0.18μm标准CMOS工艺下实际流片测试,以验证新方法的有效性。实验结果表明,室温条件下,通过2秒的自动校准,使用此方法实现的CMOS温度传感器的校准后误差可小于0.1℃。CMOS temperature sensors need to be calibrated to obtain high precision for normal working,but most of the calibration techniques available at present are manual operation,which is timeconsuming and expensive,and is difficult to meet the needs of mass production of chips.To solve the problem,based on the successive approximation algorithm,an automatic calibration method for CMOS temperature sensor is proposed,and the actual chip tapeout test under Global Foundries 0.18μm standard CMOS process is carried out to verify the effectiveness of the new method.Experimental results show that the calibration error of CMOS temperature sensor realized by the method can be less than 0.1℃after 2 seconds of automatic calibration at room temperature.

关 键 词：CMOS温度传感器 自动校准 逐次逼近算法 

分 类 号：TN43[电子电信—微电子学与固体电子学]