脉冲激光加工氮化硅陶瓷表面形貌影响  

Effect of Pulsed Laser on Surface Morphology of Silicon Nitride Ceramics

作　　者：陈勇彪 尉迟广智 李锶[2] 张松辉 段佳 CHEN Yongbiao;YUCHI Guangzhi;LI Si;ZHANG Songhui;DUAN Jia(Hunan Kemeidr Electric Co.,Ltd,Yueyang 414000,China;School of Mechanical Engineering,Hunan Institute of Science and Technology,Yueyang 414006,China)

机构地区：[1]湖南科美达电气股份有限公司,湖南岳阳414000 [2]湖南理工学院机械工程学院,湖南岳阳414006

出　　处：《湖南理工学院学报（自然科学版）》2021年第2期10-14,94,共6页Journal of Hunan Institute of Science and Technology(Natural Sciences)

基　　金：湖南省自然科学基金项目(2020JJ4334)。

摘　　要：脉冲激光加工作为一种高材料去除率的非接触加工技术,相较于传统机械加工技术,在陶瓷复杂结构的制备方面有广泛的选择性.利用不同规格参数的脉冲激光在氮化硅表面加工出沟槽结构,并通过三维超大景深显微系统观察烧蚀后的表面形貌,以此阐述脉冲激光单项参数对于氮化硅陶瓷加工表面的作用.结果表明,激光功率的改变对于氮化硅陶瓷加工表面有着显著的影响,伴随激光功率的提升,其作用于材料的深度越大.当激光功率提升至35W时,激光作用深度最高涨幅达181.3%.激光扫描速率的减慢对于沟槽表面质量提高同样具有积极作用,表面形貌会随着激光扫描速率的减慢而有所改善.As a non-contact processing technology with high material removal rate,pulsed laser processing has wide selectivity in the preparation of complex ceramic structures compared with traditional machining technology.In this paper,the groove structure was processed on the surface of silicon nitride by pulsed laser with different specifications,and the surface morphology after ablation was observed through 3D ultra-large depth of field microscope system,so as to illustrate the effect of pulsed laser’s single parameter on the surface of silicon nitride ceramic.It is found that the change of laser power has a significant effect on the surface of silicon nitride ceramics,with the increase of laser power,the processed groove’s surface becomes smoother and depth becomes deeper.When the laser power is increased to 35 W,Laser processing depth up to 181.3%.The reduction of laser scanning speed also has a positive effect on the surface quality of the groove.The surface morphology will be improved with the reduction of laser scanning speed.

关 键 词：氮化硅陶瓷 激光烧蚀 激光加工 表面形貌 

分 类 号：TG665[金属学及工艺—金属切削加工及机床] TQ174[化学工程—陶瓷工业]