基于声表面波传感器的洗涤剂残留量检测  

Measurement of Detergent Residues Based on Surface Acoustic Wave Sensor

作　　者：徐辅庆 陈智军[1] 彭福强 姜建利 韩超[1] 郭佳佳 XU Fuqing;CHEN Zhijun;PENG Fuqiang;JIANG Jianli;HAN Chao;GUO Jiajia(College of Automation Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 211106,China;Deqing Huaying Electronics Co.,China Electronics Technology Group Corporation, Deqing 313200,China)

机构地区：[1]南京航空航天大学自动化学院,江苏南京211106 [2]中电科技德清华莹电子有限公司,浙江德清313200

出　　处：《压电与声光》2021年第2期217-221,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(51475240)。

摘　　要：该文建立了声表面波传感器的液体传感模型,分析了水平剪切声表面波(SH-SAW)对洗涤剂残留量的敏感机理,通过洗涤剂浓度变化引起液体特征参数变化并导致声表面波传播参数的变化来实现检测功能。设计并制作了包括自由化通道、金属化通道的双通道传感器,以及与之配套的液槽面板和测试板。实验测试结果表明,可通过对传感器自由化通道谐振频率的测量来实现对洗涤剂残留量的检测,在(0~240)×10^(-6)范围内测量误差小于16.8×10^(-6)。The liquid sensing model of the surface acoustic wave sensor is established,and the sensitive mechanism of the shear-horizontal surface acoustic wave to the detergent residues is analyzed.The change of the detergent concentration causes the change of liquid characteristic parameters and results in the change of the propagation parameters of surface acoustic wave,which is used to realize the measurement function.A dual channel sensor composed of a free channel and a metallized channel,as well as a matching tank panel and a test circuit board are designed and manufactured.The experimental results show that the detergent residues can be detected by measuring the resonant frequency of the sensors free channel,and the measurement error in the range of(0~240)×10^(-6) is less than 16.8×10^(-6).

关 键 词：液体传感 水平剪切声表面波 液体特征参数 洗涤剂残留量 谐振频率 

分 类 号：TN9[电子电信—信息与通信工程] TP212[自动化与计算机技术—检测技术与自动化装置]