基于纸基电极的柔性电容式压力传感器  

Flexible Capacitive Pressure Sensor Based on Paper-Based Electrodes

作　　者：张建 张鹏 陈昱丞 李玉霞 黄梁松 Zhang Jian;Zhang Peng;Chen Yucheng;Li Yuxia;Huang Liangsong(College of Electrical and Automation Engineering,Shandong University of Science and Technology,Qingdao 266590,China)

机构地区：[1]山东科技大学电气与自动化工程学院,山东青岛266590

出　　处：《微纳电子技术》2021年第3期233-237,253,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金重大研究计划资助项目(91848206)。

摘　　要：柔性电容式传感器在人体运动检测设备和智能假肢手等可穿戴领域具有广泛的应用。以多壁碳纳米管(MWCNT)为导电材料、A4纸为基底、弹性海绵为介电层,将MWCNT喷涂于A4纸的表面形成电极,设计并制备了基于纸基电极的三明治结构柔性电容式压力传感器。该传感器具有制作工艺简单、材料易得和成本低等特点。测试结果表明:该传感器灵敏度高(0.278kPa^(-1),<15kPa),检测压力范围广(可达50kPa),动态响应快(360ms),多次循环中保持良好的重复性。实验结果证明:传感器在手指的弯曲程度、抓取物体和传感器阵列压力分布的测试中呈现出良好的性能。Flexible capacitive sensors have been widely used in wearable fields such as human motion detection equipment and smart prosthetic hands.Using multi-wall carbon nanotubes(MWCNTs)as conductive material,A4 paper as substrate,and elastic sponge as dielectric layer,a sandwich structure flexible capacitive pressure sensor based on paper-based electrodes was designed and prepared by spraying MWCNTs on the surface of A4 paper as electrode.The sensor has the characteristics of simple process,easy availability of materials and low cost.The test results show that the sensor has high sensitivity(0.278 kPa^(-1),<15 kPa),wide detection pressure range(up to 50 kPa),fast dynamic response(360 ms)and good repeatability in multiple cycles.The experimental results show that the sensor has good performances in tests of finger bending,object grasping and sensor array pressure distribution.

关 键 词：电容式传感器 多壁碳纳米管(MWCNT) 柔性材料 可穿戴领域 三明治结构 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]