基于W-SiO_(2)双金属陶瓷结构的高效率太阳能选择性吸收薄膜的优化和制备  

Optimization and preparation of the high-efficiency solar selective absorber based on double W-SiO_(2) cermet layers

作　　者：徐磊 胡二涛 涂华恬 任文帅 贺蓉 王松有[1] 赵海斌[1] 张荣君[1] 郑玉祥[1] 陈良尧[1] XU Lei;HU Er-Tao;TU Hua-Tian;REN Wen-Shuai;HE Rong;WANG Song-You;ZHAO Hai-Bin;ZHANG Rong-Jun;ZHENG Yu-Xiang;CHEN Liang-Yao(Department of Optical Science and Engineering,Fudan University,Shanghai 200433,China;College of Electronic and Optical Engineering&College of Microelectronics)

机构地区：[1]复旦大学光科学与工程系,上海200433 [2].南京邮电大学电子与光学工程学院&微电子学院,江苏南京210023

出　　处：《红外与毫米波学报》2021年第2期150-155,共6页Journal of Infrared and Millimeter Waves

基　　金：Supported by National Natural Science Foundation of China(61427815)。

摘　　要：理论优化并成功制备了一种以W-SiO_(2)双金属陶瓷作为吸收层的太阳能选择性吸收薄膜,同时提高了薄膜在太阳辐射波段的吸收并降低了在红外波段的热辐射。研究了包括金属反射层材料、吸收层金属体积分数等因素对薄膜整体吸收效率的影响。基于对Si和K9玻璃基底上生长的不同金属体积分数的W-SiO_(2)陶瓷薄膜光学常数的研究,利用磁控溅射方法制备出如下膜系:W(~150 nm)/W-SiO_(2)(94 nm,0.67HVF)/WSiO_(2)(34 nm,0.27LVF)/SiO_(2)(47 nm)。膜系实际测量结果与仿真结果完全吻合,在250∼1500 nm宽光谱波段实现了高达95.3%的吸收率,并且在600 K温度下达到0.124的低热辐射率。该四层膜系结构简单,易于制备,有很强的实际应用前景。To improve optical absorbance in the solar spectrum region as well as to reduce solar emittance in the infrared region,a new solar absorber structure based on the double W-SiO_(2) cermet layers was proposed and optimized.The factors which affect the spectral selectivity of the solar absorber such as the IR reflectance property of metal,and the volume fraction of the absorption layer were investigated.A series of W-SiO_(2) cermet films with different values of volume fraction were prepared onto Si and K9 glass substrates.The measured optical constants as well as those deduced from the data fitting were used to optimize performance of the selective solar absorber.Based on the optimized parameters,the solar absorber structure with the layer parameter,consisting of that W(~150 nm)/W-SiO_(2)(94 nm,0.67HVF)/W-SiO_(2)(34 nm,0.27LVF)/SiO_(2)(47 nm),was fabricated using a magnetron sputtering system at room temperature.The experimental results agree well with the simulated ones,showing an average optical absorption of 95.3%in the wavelength region of 250∼1500 nm,and a low thermal emittance of about 0.124 at 600 K in the broad wavelength region of 0.25∼25μm.Due to the simple components and high efficiency,the solar selective absorber based on the structures consisting of double W-SiO_(2) cermet layers shows a good potential for practical applications in the future.

关 键 词：太阳能选择性吸收薄膜 W-SiO_(2)金属陶瓷 高太阳能吸收率 低热辐射率 

分 类 号：O43[机械工程—光学工程]