高能激光单晶硅反射镜纳米精度控形控性制造技术  

Nanoprecision Control of Shape and Performance Manufacturing Technology for High-Energy Laser Silicon Components

作　　者：石峰[1,2] 田野 乔硕 周光奇 宋辞 薛帅 铁贵鹏 周林[1,2] 舒勇 周港 Shi Feng;Tian Ye;Qiao Shuo;Zhou Guangqi;Song Ci;Xue Shuai;Tie Guipeng;Zhou Lin;Shu Yong;Zhou Gang(College of Intelligence Science,National University of Defense Technology,Changsha Hunan 410073 China;Key Laboratory of Science and Technology on Integrated Logistics Support,National University of Defense Technology,Changsha Hunan 410073 China;College of Electromechanical Engineering,Changsha University,Changsha Hunan 410022 China;Aviation Maintenance NCO Academy,Air Force Engineering University,Xinyang Henan 464000 China)

机构地区：[1]国防科技大学智能科学学院,湖南长沙410073 [2]国防科技大学装备综合保障技术重点实验室,湖南长沙410073 [3]长沙学院机电工程学院,湖南长沙410022 [4]空军工程大学航空机务士官学校,河南信阳464000

出　　处：《中国激光》2021年第4期128-136,共9页Chinese Journal of Lasers

基　　金：NSFC-广东联合基金(U1801259);国家自然科学基金(51835013,51675526);湖南省科技创新计划(2020RC2037);湖南省教育厅科学研究项目(20C0151)。

摘　　要：单晶硅反射镜是高能激光系统中的重要元件,其加工质量直接影响着高能激光系统的整体性能指标。针对单晶硅反射镜加工过程中产生的各类缺陷问题,本研究团队提出了采用超精密切削、浸没式抛光、磁流变抛光、离子束抛光等超精密加工方法来提升单晶硅元件的加工质量,并开展了相关研究。本文主要综述了本团队近几年在单晶硅制造技术领域取得的研究进展,包括单晶硅纳米精度表面控形制造技术、单晶硅纳米精度本征表面控性生成方法、纳米精度控形控性组合工艺等一系列关键技术。通过探讨高能激光单晶硅元件制造的现状与关键技术,为实现单晶硅元件纳米精度控形控性制造提供技术支撑。Significance In high-power infrared laser systems,monocrystalline silicon reflectors are widely used,and the reflectors need to achieve high-precision,high-stability beam transmission under high-power laser irradiation for long durations.The high accuracy of components and laser load capacity are both highly desired.With the continuous development of high-energy laser technology,the performance of existing monocrystalline silicon components has been unable to support the further improvement of system output power and performance,which has become a technical shortcoming.A high-energy laser system requires optimum reflector performance in systems,i.e.,precision and laser load capacity.The pursuit of full-frequency spatial error restraint and reduction of laser energy absorption rate depends on fabrication quality.However,at present,fabrication technology inherits from traditional optical processing,and it is difficult to achieve both precision and laser load capability.Accordingly,it is necessary to investigate manufacturing methods and processes and combine innovative manufacturing techniques with application characteristics.By discussing the present situation and key technology of monocrystalline silicon component manufacturing,we hope technical support for realizing nanoprecision shape control manufacturing of monocrystalline silicon can be provided.Progress This article summarizes the current status of and difficulties in manufacturing high-energy laser aspheric components and reveals the typical processing defect morphology and generation mechanism that reduce the laser load capacity.Based on the realization of high-precision processing of aspherical components,the role of new methods of controllable flexible body processing based on immersion smooth polishing,ion beam sputtering cleaning,and other methods in controlling defects is discussed to realize the formation of high-energy laser aspherical components.The specific research includes the following aspects:(1)Nanoprecision surface shape control manufacturi

关 键 词：光学制造 高能激光系统 单晶硅元件 浸没式光顺抛光 离子束抛光 

分 类 号：O436[机械工程—光学工程]