基于光压原理的高功率激光测量装置  

High-Power Laser Measurement Device Based on Light Pressure Principle

作　　者：孙青 马冲[1] 林延东[1] 张云鹏[1] 徐涛[1] Sun Qing;Ma Chong;Lin Yandong;Zhang Yunpeng;Xu Tao(Division of Optical Met rology,National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国计量科学研究院光学与激光计量科学研究所,北京100029

出　　处：《中国激光》2021年第3期186-188,共3页Chinese Journal of Lasers

基　　金：国家重点研发计划(2018YFF0212402);质量技术基础能力建设专项(ANL2005);中央事业单位基本科研业务费重点领域项目(AKYZD2005-3);国家自然科学基金(61205099,11874333)。

摘　　要：建立了一套基于光压原理的高功率激光测量装置,其功率测量不确定度优于2%(置信因子k=2)。在0.6~15 kW功率范围内将光压方法与量热方法进行了比较,得到的最大相对偏差小于1%。该装置的功率测量上限仅受限于激光反射镜的损伤阈值,因此其功率测量上限可达100 kW甚至更高,同时还具有响应速度快、测量准确度高、可在线测量等优点。Objective High-power lasers have important applications in industrial processing,military defense,scientific research,and other fields.With the development of laser technology in recent years,the output power level of lasers has been continuously improved.The accurate measurement of power is the basis of researches and applications of high-power lasers.Traditional high-power laser measurement mainly uses calorimetric methods.The device is large and heavy,and the surface of the absorption material is easily damaged by laser.Methods Although the photon has no static mass,it has momentum.When the laser is irradiated on the surface of the object,pressure will be generated.Using the light pressure effect,the laser power can be traced directly to the micro-nano force or micro-mass.Figure 1 is the principle diagram of the measuring device,which adopts the structural design of three mirrors,and the transmission direction of the laser remains unchanged after three reflections.One of the mirrors is installed on the weighing module,and the weighing module is placed horizontally in the same manner as the mass calibration.Results and Discusions Figure 2 shows the time response curve of the optical pressure measurement device.The laser emission time is set to 20 s,and the response time of the measurement device is only 3 s.A calorimetric laser power meter that has been accurately calibrated is placed behind the optical pressure measurement device for simultaneous measurement.The measurement results of the two methods are compared.The maximum relative deviation is less than1%.Limited by the output power of the test light source,the upper limit of power measurement is only verified to 15 kW.In fact,the upper limit of power measurement of the device is only limited by the damage threshold of the laser mirror,so the upper limit of power measurement can reach 100 kW or even higher.Conclusions Based on the principle of light pressure,a set of high-power laser measurement devices is established,and the power measurement uncertainty i

关 键 词：测量 高功率激光 光压 在线测量 测量不确定度 

分 类 号：O432.1[机械工程—光学工程]