能量分析器型真空电离规性能研究  

Performance Study of Vacuum Ionization Gauge Based on the Energy Filter Analyzer

作　　者：侯颖杰 张虎忠[1] 李得天[1] 魏建平 成永军[1] HOU Yingjie;ZHANG Huzhong;LI Detian;WEI Jianping;CHENG Yongjun(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所,真空技术与物理重点实验室,兰州730000

出　　处：《真空科学与技术学报》2021年第2期126-131,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(41904166,61627805)。

摘　　要：电子激励脱附(ESD)效应和软X射线效应是影响电离真空计测量下限的两大重要因素。基于能量分析器研制了电离真空规,在极高真空校准装置上对其开展性能研究,包括不同压力或不同阴极发射电流下的离子流、ESD效应和软X射线影响。结果表明,系统压力介于10^(-8) Pa和10^(-6) Pa之间,当气体发生电离,能量分析器电压在低于阳极电压约25 V时收集极能得到最大的气相离子流。系统压力在10-7~10^(-8) Pa量级,采用2.5 mA的发射电流可得到比1 mA更大的气相离子流值。分离气相离子与ESD离子的能量筒电压差约为30 V,规管栅极除气后可降低ESD效应至除气前的37.5%。电离规的软X射线带来的本底干扰对应等效压力约为9×10^(-11) Pa。For ionization gauges,the Electron Stimulated Desorption(ESD) effect and soft X-ray effect are the two significant factors to impact the lower limit of the vacuum measurement.A new ionization gauge has been developed,which was based on the energy filter analyzer.Performances of the gauge have been studied on the extreme high vacuum calibration apparatus,such as the ion current under different system pressure or with different emission current from the cathode,ESD effect and soft X-ray effect.According to the experimental results,under the pressure order of magnitude of 10^(-8) to 10^(-6) Pa,the ion collector can get the maximum gas phase ion current as the voltage of the energy filter is lower than that of grid for about 25 V.With the system pressure within 10^(-8)~10^(-9) Pa,more gas phase ions could be collected with the emission current of 2.5 mA than that of with 1 mA.The voltage difference for the energy filter analyzer to separate gas phase ions and ESD ions is about 30 V on average.Furthermore,the intensity of ESD phase ions from the anode could be eliminated by the electron bombardment degassing process to about 37.5% before the degassing process thereof.The background intensity caused by soft X-rays was equivalent to a pressure of about 9×10^(-11) Pa.

关 键 词：电离规 能量分析器 离子流 ESD效应 软X射线 

分 类 号：O46[理学—电子物理学]