基于质量流量控制器的动态配气系统对比研究  

Comparative Study on Dynamic Valve System based on Mass Flow Controller

作　　者：张亚飞 唐松 蒋帆 Zhang Yafei;Tang Song;Jiang Fan(Shanghai Institute of Measurement and Testing Technology,Shanghai 200233,China)

机构地区：[1]上海市计量测试技术研究院,上海200233

出　　处：《山东化工》2021年第7期256-258,共3页Shandong Chemical Industry

摘　　要：在实际应用中为了保证监测设备监测数据的准确,现场质控需要用到不同浓度的标准气体对监测设备进行多点标定,根据曲线拟合理论,标定点越多,拟合的曲线就越准确。但是,随着标定成分和标定点数目的增加就需要多种标准气体。如果统一采用标气进行标定,其具有成本高、数量多、易浪费、不易携带、有安全隐患等严重问题。因此,以质量流量控制器为核心的动态校准仪(或动态气体稀释装置等此类设备)或者苏玛罐配气系统就可以解决以上各种实际问题。其利用高浓度标准气体和稀释气,通过对各气路气体流量的精确控制,从而实现多浓度点气体的连续、稳定配制,且不受使用环境温度和压力的影响,具有很大的实际应用价值。In practical application,in order to ensure the accuracy of monitoring data of monitoring equipment,field quality control needs to use different concentrations of standard gas to calibrate the monitoring equipment.According to the curve fitting theory,the more calibration points,the more accurate the curve fitting.However,with the increase of calibration components and calibration points,a variety of standard gases are needed.If the standard gas is used for calibration,it has serious problems,such as high cost,large quantity,easy to waste,difficult to carry,and potential safety hazard.Therefore,the dynamic calibrator(or dynamic gas dilution device and other equipment)with mass flow controller as the core or Suma tank gas distribution system can solve the above practical problems.It uses high concentration standard gas and dilution gas,through the accurate control of gas flow in each gas path,so as to realize the continuous and stable preparation of multi concentration point gas,and is not affected by the temperature and pressure of the environment,so it has great practical application value.

关 键 词：配气仪 苏玛罐 标气 

分 类 号：X85[环境科学与工程—环境工程]