金属孔阵列电极板间大气压等离子体的微波传输特性  

Microwave transmission characteristics of atmospheric pressure plasma between metallic hole array electrodes

作　　者：褚佳琪 徐金洲 朱芸桢 CHU Jiaqi;XU Jinzhou;ZHU Yunzhen(College of Science,Donghua University,Shanghai 201620,China)

机构地区：[1]东华大学理学院,上海201620

出　　处：《东华大学学报（自然科学版）》2021年第2期113-118,124,共7页Journal of Donghua University(Natural Science)

基　　金：国家自然科学基金资助项目(11075033)。

摘　　要：为探究微波反射法用于诊断射频大气压辉光放电等离子体核心区的可行性,使用COMSOL软件仿真模拟微波通过金属孔阵列结构及存在等离子体的金属孔阵列电极结构的传输特性,分别研究结构参数和等离子体密度对微波传输的影响。结果表明:在57~61 GHz反射频谱中存在两种具有相反特性的表面等离激元共振模式;改变电极的结构尺寸会导致共振频率的漂移;低频模式的反射随等离子体密度的增加而增大,高频模式的反射则表现出相反的响应,尤其在等离子体密度10^(17)~10^(19) m^(-3)内变化明显。因此,应用高频模式的微波传输特性诊断核心区等离子体具有一定的可行性。To explore the feasibility of microwave reflection method for diagnosing the core region of radio frequency atmospheric pressure glow discharge plasma,the microwave transmission characteristics through metallic hole array structure and through the metallic hole array electrode plates with plasma were simulated by COMSOL software.The effects of the geometric dimensions and the plasma density on microwave behaviors were studied respectively.The results show that there are two different surface plasmon resonance modes in the reflection spectra in 57-61 GHz.Changing the structure size of the electrode will cause the resonance frequency to drift.The reflection of low-frequency mode increases with the increase of plasma density,while the one of high-frequency mode shows an opposite response,especially at the range of 10^(17)-10^(19) m^(-3).Thus,it is feasible to apply the high-frequency mode to diagnose the core plasma.

关 键 词：微波传输 大气压等离子体 金属孔阵列 表面等离激元共振 诊断 

分 类 号：O536[理学—等离子体物理]