大气压下Ar/CF_(4)纳秒脉冲放电等离子体特性  

Plasma characteristics of Ar/CF_(4) nanosecond pulse discharge in atmosphere

作　　者：王军毅 施芸城[1] WANG Junyi;SHI Yuncheng(College of Science,Donghua University,Shanghai 201620,China)

机构地区：[1]东华大学理学院,上海201620

出　　处：《东华大学学报（自然科学版）》2021年第2期125-130,共6页Journal of Donghua University(Natural Science)

摘　　要：探索大气压下Ar/CF_(4)放电产生的高活性含氟等离子体的特性,为含氟基团的材料改性提供理论和试验支持,选取纳秒脉冲电源对Ar/CF_(4)混合气体进行同轴管状介质阻挡放电研究。改变CF_(4)的体积分数后,测量气体放电的点火电压和脉冲电流,拍摄其放电发光图像,同步采集气体放电的发射光谱图。利用玻尔兹曼斜率法计算放电产生的等离子体的电子激发温度,采用非类氢原子Ar的Stark展宽计算电子密度。结果表明:Ar/CF_(4)混合气体的点火电压随CF_(4)的体积分数的增大而升高;Ar掺入CF_(4)后气体放电的颜色由纯Ar的淡紫色变为暖黄色;随脉冲电压的增大,Ar和F谱线的强度增强;放电管内的电子温度在CF_(4)体积分数为4.0%时相对最高,此时电子密度为1.54×10^(14) cm^(-3)。Exploring the plasma characteristics of highly active fluorine-containing plasma generated by Ar/CF_(4) discharge at atmospheric pressure to provide theoretical and experimental support for the modification of fluorine-containing materials,the nanosecond pulse power was seleeted to perform coaxial tubular dielectric barrier on the Ar/CF_(4) mixed gas discharge research.After changing the volume fraction of CF_(4),the ignition voltage,the pulse current,and the discharge luminescence image were collected,and the emission spectrum of the gas discharge was obtained simultaneously.The electron excitation temperature of the plasma generated by the discharge was calculated according to the Boltzmann slope method,and the electron density was calculated using the Stark spread of the non-hydrogen-like atom Ar.The results show that the ignition voltage of the Ar/CF_(4) gas mixture increases with the volume fraction of CF_(4).The color of the gas discharge after Ar is mixed with CF_(4) changes from pure Ar light purple to warm yellow;as the pulse voltage increases,the intensity of the Ar and F lines increases.When the volume fraction of CF_(4) is 4.0%,the electron temperature in the discharge tube is relatively highest,and the electron density is 1.54×10^(14) cm^(-3).

关 键 词：点火电压 光谱强度 电子激发温度 电子密度 

分 类 号：O539[理学—等离子体物理]