量子级联激光器的热管理研究进展  

The progress of Quantum Cascade Lasers thermal management

作　　者：张泽涵 蒋涛[1,2] 湛治强 王雪敏[1,2] 罗佳文 彭丽萍[1,2] 樊龙 肖婷婷 吴卫东[1,2] ZHANG Zehan;JIANG Tao;ZHAN Zhiqiang;WANG Xuemin;LUO Jiawen;PENG Liping;FAN Long;XIAO Tingting;WU Weidong(Science and Technology on Plasma Physics Laboratory,China Academy of Engineering Physics,Mianyang Sichuan 621999,China;Research Center of Laser Fusion,China Academy of Engineering Physics,Mianyang Sichuan 621999,China)

机构地区：[1]中国工程物理研究院等离子体物理重点实验室,四川绵阳621999 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621999

出　　处：《太赫兹科学与电子信息学报》2021年第2期193-200,共8页Journal of Terahertz Science and Electronic Information Technology

基　　金：中国工程物理研究院高能激光科学与技术重点实验室基金资助项目(2019HEL11);中国工程物理研究院激光聚变研究中心青年人才基金资助项目(RCFCZ1-2017-20)。

摘　　要：作为目前最重要的中远红外光源,量子级联激光器(QCL)因独特的性能和频率可拓展至太赫兹(THz)的特点,成为研究的热点。对于QCL,影响其输出功率和工作温度的因素较多,其中高效散热是重要的因素。首先对中红外和太赫兹两种QCL的热管理研究进行了归纳和总结;讨论和分析了两者之间的相似和不同点,主要讨论两种激光器固体侧散热的方法,包括有源区设计、改进工艺、优化器件材料体系等方面;最后,对QCL热管理的未来研究趋势进行了分析和预测。该结果对于QCL的性能提升,特别是输出功率和工作温度的提高,具有一定的参考意义。As the most important mid-infrared source at present,Quantum Cascade Lasers(QCL)has become one of the research hotspots due to its unique performance and frequency that can be extended to terahertz(THz).For QCL,there are many factors affecting their output power and operating temperature,and efficient heat dissipation is an important factor.In this paper,the thermal management research of two kinds of QCL including mid-infrared and terahertz is summarized.Secondly,the similarities and differences between the two are discussed and analyzed.Two methods of heat dissipation on the solid side of lasers are mainly discussed,including active areas design,processes improvement,and the optimization of device material systems.Finally,the future research trends of thermal management of QCL are analyzed and predicted.This result has certain reference significance for the performance improvement of QCL,especially the improvement of output power and working temperature.

关 键 词：量子级联激光器 热管理 太赫兹 中红外 

分 类 号：TN248[电子电信—物理电子学]