面向物联网监测节点的集成式微流控传感芯片  

Integrated Microfluidic-Sensor Chip for Internet of Things Sensing Node

作　　者：张孟伦 张希[1] 牛鹏飞 ZHANG Menglun;ZHANG Xi;NIU Pengfei(State Key Laboratory of Precision Measuring Technology&Instruments,Tianjin University,Tianjin 300072,China)

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072

出　　处：《传感技术学报》2021年第2期157-161,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(62001322,51375341,61901295);天津市自然科学基金项目(20JCQNJC01120)。

摘　　要：水环境中的重金属污染具有很高的毒性和不可降解性,对公众健康和生态环境构成了巨大威胁。但大多数现有的检测方法需要大型仪器和人工处理,即便是在线监测系统,也由于其尺寸大、价格高而难以大规模应用。本文基于MEMS加工工艺,设计并制造了一种体积小、自动化的重金属离子检测芯片。通过lift-off工艺,将三电极电化学传感器集成至数字微流控芯片上。实验结果表明,该芯片可以实现样品的自动输运和铅离子的电化学传感检测。将来,通过进一步减小控制系统的尺寸和适当的封装,可以将其制成一个微型传感节点,为物联网的分布式监视提供潜在的解决方案。Heavy metal pollution in water environment poses a great threat to public health and ecological environment due to its high toxicity and non-degradation.However,most of the existing detection methods require large instruments and time-consuming manual operation.Even the online monitoring system is difficult to be deployed on a large scale due to its large size and high price.This paper designed and manufactured a small,automated heavy metal ion detection chip based on MEMS processing technology.The three-electrode electrochemical sensor was integrated on a digital microfluidic chip through the lift-off process.The experimental results show that the chip can automatically transport samples and detect lead ions.In the future,by further reducing the size of the control system and appropriate packaging,it can be made into a miniature sensor node,providing a potential solution for distributed monitoring of the Internet of Things(IoT).

关 键 词：电化学 微流控 重金属 物联网节点 

分 类 号：TH832[机械工程—仪器科学与技术]